Free Access to Nanolithography & Supporting Processes, University of Bath

免费使用纳米光刻技术

• 批准号: EP/K040324/1
• 负责人: Simon Bending
• 金额: $ 23.63万
• 依托单位: University of Bath
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2013
• 资助国家: 英国
• 起止时间: 2013 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=EP%2FK040324%2F1
• 关键词: Free; Access; Nanolithography; Supporting; Processes

We request continued funding for a previous successful EPSRC-funded Equipment Sharing Initiative to provide UK academic groups with free point-of-use access to electron beam nanolithography in the David Bullett Nanofabrication Facility at the University of Bath. Our scheme will focus on providing 'pump-priming' support for new research that is enabled by access to our nanofabrication tools, particularly work at the Physics/Engineering-Biology and Physics/Engineering-Chemistry interdisciplinary interfaces. Not only will we share our extensive design and process expertise with users, but we shall also provide training and support within a comprehensive package of services including nanolithography, wet & dry etching, thin film deposition and SEM/AFM imaging. We will actively seek opportunities to enhance the multi-disciplinary skills of early career users (postgraduate and post-doctoral researchers) whenever possible. We also propose to purchase a new complementary direct-write laser lithography tool that will allow us to offer users a quicker and more versatile service with unique new features for advanced prototyping (e.g., 3D lithography in thick photoresist and/or on non-planar substrates).

我们请求继续为之前由 EPSRC 资助的成功设备共享计划提供资金，以便为英国学术团体提供免费使用巴斯大学 David Bullett 纳米加工设施中的电子束纳米光刻技术的使用点。我们的计划将侧重于为通过使用我们的纳米制造工具实现的新研究提供“泵启动”支持，特别是物理/工程-生物学和物理/工程-化学跨学科接口的工作。我们不仅将与用户分享我们广泛的设计和工艺专业知识，而且还将提供全面的服务包中的培训和支持，包括纳米光刻、湿法和干法蚀刻、薄膜沉积和 SEM/AFM 成像。我们将尽可能积极寻求机会，提高早期职业用户（研究生和博士后研究人员）的多学科技能。我们还建议购买一种新的互补直写激光光刻工具，这将使我们能够为用户提供更快、更通用的服务，并具有先进原型制作的独特新功能（例如，在厚光刻胶和/或非平面基板上进行 3D 光刻） ）。

项目成果

Hut-LikePillar Si Solar Cells

小屋式柱状硅太阳能电池

• 发表时间: 2016
• 作者: Agrawal A

Hut-like pillar array Si solar cells

• DOI: 10.1016/j.solener.2016.03.026
• 发表时间: 2016-07
• 期刊: Solar Energy
• 影响因子: 6.7
• 作者: F. Cabrera‐España;A. Agrawal

The David Bullett Nanofabrication Facility

David Bullett 纳米加工设施

• 作者: Bending S J

X-ray imaging and micro-spectroscopy unravel the role of zincate and zinc oxide in the cycling of zinc anodes in mildly acidic aqueous electrolytes

• DOI: 10.1016/j.jpowsour.2022.231063
• 发表时间: 2022-02-03
• 期刊: JOURNAL OF POWER SOURCES
• 影响因子: 9.2
• 作者: Kazemian，Majid;Rossi，Francesca;Bozzini，Benedetto
• 通讯作者: Bozzini，Benedetto