Navigation grade MEMS Gyro

导航级MEMS陀螺仪

• 批准号: 830249
• 金额: $ 95.57万
• 依托单位: SILICON MICROGRAVITY LIMITED
• 依托单位国家: 英国
• 项目类别: Innovation Loans
• 财政年份: 2021
• 资助国家: 英国
• 起止时间: 2021 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=830249
• 关键词: Navigation; grade; MEMS; Gyro

There is an increasing need to accurately measure movement and position in a broad range of applications including aerospace, automotive, robotics, underwater to name a few. Key to this are Inertial Navigation systems that do not rely on global positioning systems to measure movement and determine location. Within Inertial Navigation systems, the key technology is the Inertial Measurement Unit (IMU). An IMU is a combination of 3-axis accelerometers and 3-axis gyroscopes. Accuracy and specifically Bias Instability are key to delivering accurate positioning. Presently the high end IMU market is serviced by Fibre Optic Gyroscopes but these are large in size and costly. MEMS sensors have long been seen as a potential solution to this due to their small size and ability to be manufactured in large volumes. However, the present capacitance-based MEMS sensors do not have the performance required for the high-end IMU market.Silicon Microgravity is a spin-out of Cambridge University which is developing high-end accelerometers and gyroscopes based on its resonant vibrating beam MEMS technology. This project builds on its work on accelerometers and gravity sensors to develop a Navigation grade MEMS gyroscope with a Bias Instability of 0.01°/hr. This would be a breakthrough technology allowing MEMS for the first time to compete directly with solutions hitherto the preserve of specialised fibre optic gyroscopes.

在航空航天、汽车、机器人、水下等广泛应用中，对精确测量运动和位置的需求日益增长，其中关键是不依赖全球定位系统来测量运动和确定的惯性导航系统。在惯性导航系统中，关键技术是惯性测量单元 (IMU)，IMU 是 3 轴加速度计和 3 轴陀螺仪尤其是偏差的组合。不稳定是提供精确定位的关键，目前高端 IMU 市场由光纤陀螺仪提供服务，但由于 MEMS 传感器尺寸小且成本高，因此长期以来一直被视为解决这一问题的潜在解决方案。然而，目前基于电容的 MEMS 传感器不具备高端 IMU 市场所需的性能。Silicon Microgravity 是剑桥大学的衍生产品，正在开发高端 IMU。该项目基于其在加速度计和重力传感器方面的工作，开发偏置不稳定性为 0.01°/小时的导航级 MEMS 陀螺仪，这将是一项突破性技术，使 MEMS 能够应用于各种领域。首次与迄今为止专用光纤陀螺仪领域的解决方案直接竞争。