Delta X: Next Generation X-Ray Metrology for low power, high efficiency electronics device research

Delta X：用于低功耗、高效率电子设备研究的下一代 X 射线计量

• 批准号: 720088
• 金额: $ 20.36万
• 依托单位: JORDAN VALLEY SEMICONDUCTORS UK LIMITED
• 依托单位国家: 英国
• 项目类别: GRD Development of Prototype
• 财政年份: 2012
• 资助国家: 英国
• 起止时间: 2012 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=720088
• 关键词: Delta; Next; Generation; Ray; Metrology

The Delta_X project is to develop a X-ray metrology system for the semiconductor industry,capable of measuring and monitoring the key thin films required for low power, highefficiency devices. These devices are being developed to be used in several applications; fromsolid state LED lighting, solar cells and more efficient high power electronics. All of theserequire measurement of nanoscale films to improve the performance of the devices andmanufacturing efficiency. The films are becoming more complex, meaning existing metrologyis not capable of giving the required information in a reasonable timescale for themanufacturer. The new Delta_X system will incorporate new technology on both X-ray sourcand detector to allow the measurement of these advanced films to accelerate the productdevelopment and improve the production process of these critical devices enabling theacceleration of higher efficiency lighting and electronics into mainstream use, thus reducingcarbon emissions and reducing energy consumption.

Delta_x项目是为半导体行业开发X射线计量系统，能够测量和监视低功率，高效设备所需的关键薄膜。这些设备正在开发用于多种应用程序。从苏利胶状态LED照明，太阳能电池和更有效的高功率电子设备。纳米级膜的所有测量都可以提高设备和制造效率的性能。这些电影变得越来越复杂，这意味着现有的计量学无法在制造商的合理时间范围内提供所需的信息。新的Delta_x系统将在X射线源探测器上纳入新技术，以允许测量这些高级膜以加速产品开发并改善这些关键设备的生产过程排放和减少能耗。