Practical operational use of higher order polynomials in reducing the linearity errors of nanopositioning stages

高阶多项式在减少纳米定位台线性误差方面的实际操作使用

• 批准号: 10039395
• 金额: $ 2.1万
• 依托单位: PRIOR SCIENTIFIC INSTRUMENTS LIMITED
• 依托单位国家: 英国
• 项目类别: Collaborative R&D
• 财政年份: 2022
• 资助国家: 英国
• 起止时间: 2022 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=10039395
• 关键词: Practical; operational; use; higher; order

Prior Scientific are looking for an innovative solution which allows Queensgate nanopositioning stages to continue to meet the increasing demands for semiconductor, hard disc testing and atomic force microscopy which are anticipated to routinely require low-picometre accuracies.The project proposed will develop and test higher-order automatic linearity compensation for on-axis stage calibration. A new algorithm will be developed which can be applied to existing stages, together with appropriate calibration methods. To maintain production efficiency, there must be minimum additional overhead for test and measurement with these methods. It is anticipated that this will allow us to produce precision stages with the highest linearity in the industry whilst maintaining high yields, reducing re-work and maintaining manufacturing costs.

Prior Scientific 正在寻找一种创新的解决方案，使 Queensgate 纳米定位台能够继续满足对半导体、硬盘测试和原子力显微镜日益增长的需求，预计这些需求通常需要低皮米精度。拟议的项目将开发和测试更高的精度。订购自动线性补偿以进行轴上平台校准。将开发一种可应用于现有平台的新算法以及适当的校准方法。为了保持生产效率，使用这些方法进行测试和测量的额外开销必须最小化。预计这将使我们能够生产具有业内最高线性度的精密平台，同时保持高产量、减少返工并维持制造成本。