Piecewise adaptive linearity compensation for multi-axis nanopositioning stages

多轴纳米定位平台的分段自适应线性补偿

• 批准号: 10022720
• 金额: $ 1.6万
• 依托单位: PRIOR SCIENTIFIC INSTRUMENTS LIMITED
• 依托单位国家: 英国
• 项目类别: Collaborative R&D
• 财政年份: 2022
• 资助国家: 英国
• 起止时间: 2022 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=10022720
• 关键词: Piecewise; adaptive; linearity; compensation; multi

Queensgate have unique control capability with expertise in high speed, high precision applications. Ultra-low noise electronics allow operation at higher bandwidths; over 40% of the stage resonant frequency with low picometre resolutions. Control of acceleration and deceleration enables the fastest step settle times, and recently velocity control was introduced which has significant advantages for fast imaging.As part of Prior Scientific, Queensgate have developed longer-range stages providing significant advantages for image acquisition using multiphoton microscopy. Piecewise adaptive linearity compensation will improve linearization for longer range (400 µm to 800 µm) multi-axis stages (XY and XYZ) and stages with local linearity errors.Improved linearization will extend the use of the long-range multi-axis stage to surface imaging applications which require sub-nanometre resolutions and reduce image distortion. This has application in life science, semiconductor wafer testing and manufacture and has potential for quantum photonics.

Queensgate具有高速，高精度应用的独特控制，较高的带宽；使用多光子显微镜的预压将改善线性范围（400 µm至800 µm），并具有局部线性误差的阶段。改进的线性化将扩展使用远距离轴的使用并减少图像失真。