The development of low noise Schottky diode detector/mixers in the THz region

太赫兹区域低噪声肖特基二极管检波器/混频器的开发

基本信息

批准号：
09650376
负责人：
SUZUKI Tetsu
金额：
$ 1.66万
依托单位：
Sendai National College of Technology (1998)Tohoku University (1997)
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1998
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09650376/
关键词：
Schottky barrier diode QUIP-SBD ECR plasma etching THz Plasma diagnostics Mixer Earth atmosphere remote sencing THz帯低欠陥 l f雑音導波管検出器ミキサ-GaAs

项目摘要

We have developed new low noise Schottky barrier diode (SBD) detector/mixers for 2.5THz earth atmospheric remote sensing and 4THz high-resolution plasma diagnostics.For these purposes, primarily, we have developed low damage ECR plasma process with in-situ monitoring of ion sources, electron density, electron temperature, potential of substrate, and temperature of substrate. These data clarified that chamber cleaning by using Ar/0_2 plasma is important and effective to improve reproducibility of etching rate and low damage etching condition.Secondarily, we have developed Quasi-Integrated Planer SBD (QUIP-SBD) for 2.5THz waveguide mixer. The waveguide and corrugated feedhorn structure have been developed at Rutherford Appleton Laboratory in United Kingdom. The mixer performance of 16,000K (DSB) mixer nose temperature and 15.2dB of conversion loss have been obtained at 2.5THz. The mixer is now preparing for atmospheric remote sensing satellite called High-Resolution Dynamics Limb Sounder at NASA.Thirdly, a high performance SBD detector/mixer for 4THz high-resolution plasma diagnostics has been investigated. A parabolic reflector has been introduced in order to obtain low side lobe radiation pattern instead of a corner reflector. Since a focal point of parabolic reflector can be designed flexibly, spacing between the reflector and the whisker was optimized by using computer simulation, so that the side lobes were reduced at 4THz. Fabrication of the new SBD detector/mixer structure will be completed in Apr. 1999 and it will be tested and measured at National Institute for Fusion Science and Chubu University.

我们已经开发了新的低噪声Schottky屏障二极管（SBD）检测器/混合器，用于2.5thz地球大气遥感和4THZ高分辨率等离子体诊断。对于这些目的，我们已经开发了低损害ECR血浆过程，并具有对原地监测的监测离子源，电子密度，电子温度，底物的电势和底物温度。这些数据阐明了使用AR/0_2等离子体清洁室对于提高蚀刻速率和低损伤蚀刻条件的可重复性是重要且有效的。最重要的是，我们开发了2.5thz波导搅拌器的准集成刨花器SBD（QUIP-SBD）。在英国的卢瑟福·阿普尔顿实验室（Rutherford Appleton Laboratory）开发了波导和波纹式饲养场结构。在2.5THz处获得了16,000K（DSB）混合鼻温度和15.2dB的搅拌机性能。搅拌机现在正在为NASA的大气遥感卫星做准备，称为高分辨率动力学发声器。三分之一，已经研究了用于4THZ高分辨率血浆诊断的高性能SBD检测器/混合器。引入了抛物线反射器，以获得低侧叶辐射图案而不是角反射器。由于可以灵活地设计抛物线反射器的焦点，因此通过使用计算机模拟优化了反射器和晶须之间的间距，以便在4THZ处降低侧叶。新的SBD检测器/混合器结构的制造将于1999年4月完成，并将在美国国家融合科学与丘布大学进行测试和测量。