Self-Lubrication Design for Ceramic Coating via Light-Element Ion Implantation

轻元素离子注入陶瓷涂层自润滑设计

基本信息

批准号：
12305047
负责人：
AIZAWA Tatsuhiko
金额：
$ 27.48万
依托单位：
The University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2002
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12305047/
关键词：
Self-Lubrincation Mechanism Light-element Ion Implantation TiN Hard Films Low Temperature Oxidation Intermediate Oxides Surface Oxidation Control Dry Foming イオン注入軽元素注入塩素注入 TiN Al注入イオンビームスパッター自己潤滑性自己保護性軽元素打込ち塩素打込み A

项目摘要

Ion implantation is an effective surface modification technology since various kinds of elements can be implanted into any targeting materials. In particular, various surface nano-structuring can be accommodated by the light element ion implantation. Three kinds of nanostructuring methods are introduced to investigate the nano-structuring behavior via the ion implantation and to understand the nano-hetero structuring process when these nano-structured materials are in use. Ion-plated titanium nitride films are employed as a common substrate to be nano-structured. The chemical bonding state can be gradually modified with increasing the doses of carbon via ion implantation. This first nano-structuring control in chemical bonding leads to selective hardening for designated surface area. Furthermore, hardened surface is often favored for promotion of wear resistance even in the severe wearing condition. The second nano-structuring is characterized by in-situ formation of non-equilibrium co … More mpound and by cluster formation of implanted atoms. The imposed aluminum has loose bonding with the targeting material system. This results in the formation of non-equilibrium cubic solid solution (TI, Al) N. While, a part of imposed aluminum still remains as a metallic aluminum phase. With increasing the bulk temperature, these aluminum atoms make counter diffusion from the depth to the surface, resulting in the reaction with penetrating oxygen atoms from surface and the in-situ formation of dense *-alumina surface layer. This works as a protective layer to prevent titanium nitride from further oxidation even at the elevated temperature, where the original titanium nitride films can be easily oxidized. The third nano-structuring is characterized by high mobility and reactivity of implanted atoms in TiN. The implanted chlorine has no or little distinct bonding with the lattice atoms of TiN. They might well be trapped at the dislocation in TiN without significant change of lattice constants. Since they have sufficient mobility to diffuse in the columnar TiN to the surface, the surface tribo-chemical reaction in the wear track is modified to make in-situ formation of intermediate phase oxides or Magneli phase oxides. Owing to their shearing deformation, the contact surface between TiN and work materials is self-lubricated to preserve low friction and low wearing state. This surface nano-structuring with nano-hetero structural modification becomes a new material design to improve the wear toughness. Less

离子注入是一种有效的表面改性技术，因为可以将各种元素注入到任何目标材料中，特别是轻元素离子注入可以适应各种表面纳米结构，介绍了三种纳米结构方法。 -通过离子注入的结构化行为，并了解当这些纳米结构材料用作通用基材时的纳米异质结构过程。通过离子注入增加碳的剂量可以逐渐改变化学键合状态，这种化学键合的纳米结构控制导致指定表面区域的选择性硬化。此外，硬化表面通常有利于促进化学键合。即使在严重磨损条件下也具有耐磨性。第二种纳米结构的特点是非平衡化合物的原位形成和植入原子的簇形成，这与靶向材料系统具有松散的结合。结果形成非平衡立方固溶体（TI，Al）N。同时，一部分强加的铝仍然以金属铝相形式存在，随着整体温度的升高，这些铝原子从深处向表面进行反扩散，导致与表面穿透的氧原子发生反应，并原位形成致密的*-氧化铝表面层，这可以作为保护层，即使在高温下也可以防止氮化钛进一步氧化，其中原始氮化钛薄膜。第三种纳米结构的特点是TiN中注入原子的高迁移率和反应性，注入的氯与TiN的晶格原子没有或很少有明显的键合，它们很可能被捕获在TiN中的位错处。由于它们具有足够的迁移率以在柱状TiN中扩散到表面，因此磨损轨迹中的表面摩擦化学反应被改变以原位形成中间相。由于TiN氧化物或Magneli相氧化物的剪切变形，TiN和工作材料之间的接触表面可以自润滑，以保持低摩擦和低磨损状态，这种具有纳米异质结构改性的表面纳米结构成为一种新的材料设计。提高磨损韧性。