Fabrication of field emission and microdischarge devices using femtosemnd laser lithop-aphy

使用飞秒激光光刻技术制造场发射和微放电装置

基本信息

批准号：
18360354
负责人：
HIRATA Yoshinori
金额：
$ 11.05万
依托单位：
Osaka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2006
资助国家：
日本
起止时间：
2006 至 2007
项目状态：
已结题

项目摘要

In this study, we fabricated field emission and micro-discharge devices using femtosecond laser lithography. The experimental results are as follows:1. Femtosecond laser lithographyWe proposed the combined process of femtosemnd laser-induced nonlinear lithography and etching processes. This process enables to fabricate microstructures onto nonpanar substrates, which is rather difficult for the conventional photolithography processes.2. Space-selective growth of carbon nanotubes on a microelectrode tipThe patterns were formed on Au thin films by field emitted electron beams extracted from the microelectrode tips overall coated with carbon nanotubes. We investigated the effect of curvature radius, gap length between electrodes and applied voltages on the microfabrication of Au thin films by field emitted electron beams. The increases of curvature radius and applied voltages were effective for pattern formation by field emission, resulting in the patterns of 2μm diameters were created. Carbon nanotubes were space-selectively grown only on the top part of a microelectrode tip. The patterns of approximately 2μm diameters could be formed by using the microelectrodes with CNTs.3. Arrayed microdischarge cavitiesArrays of hollow cathode microelectrode cavities were fabricated in Si wafers by semiconductor technology. The diameter of individual cavity was 30μm. Stable glow discharges were generated in atmospheric pressure of Ar gas. The patterns of 33 μm diameters were successfully formed on a resist thin film by using maskless microdischarge processes with O_2 and Ar mixed gas.

在这项研究中，我们使用飞秒激光岩石学制造了田间发射和微型放电设备。实验结果如下：1。飞秒激光岩石仪我们提出了femtosemnd激光诱导的非线性岩性造影和蚀刻过程的合并过程。此过程使得可以将微结构在非木制底物上构造，这对于常规光刻过程很难。2。碳纳米管在微电极尖端上的空间选择性生长这些图案是通过从微电极尖端提取的田间发射的电子束在Au薄膜上形成的，这些电子梁是用碳纳米管涂覆的整体涂层的。我们研究了曲率半径，电子之间的间隙长度和施加电压对通过田间发射的电子束对AU薄膜微结合的影响。曲率半径的增加和施加的电压可有效地通过场发射形成图案，从而产生了直径2μm的模式。碳纳米管仅在微电极尖端的顶部进行空间选择性生长。通过使用CNT.3的微电极3。通过半导体技术在SI波中制造了空心阴极微电极腔的阵列微型腔。单个腔的直径为30μm。在AR气体的大气压力下产生稳定的抓地力放电。通过使用无掩模的微型载体工艺和AR混合气体，在抵抗薄膜上成功形成了33μm直径的图案。

项目成果

期刊论文数量（0）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Field emission current and vacuum breakdown by a pointed cathode

DOI：
10.1016/j.tsf.2006.02.085
发表时间：
2007-03
期刊：
Thin Solid Films
影响因子：
2.1
作者：
Y. Hirata;K. Ozaki;U. Ikeda;M. Mizoshiri
通讯作者：
Y. Hirata;K. Ozaki;U. Ikeda;M. Mizoshiri

フェムト秒レーザリソグラフィーによる立体的表面加工

使用飞秒激光光刻进行三维表面加工

DOI：
发表时间：
2007
期刊：
影响因子：
0
作者：
西山宏昭;溝尻瑞枝;平田好則
通讯作者：
平田好則

Three-dimensional lithography using a self-trapped filament of femtosecond laser pulses

使用飞秒激光脉冲自陷灯丝进行三维光刻

DOI：
发表时间：
2006
期刊：
Proceedings of 41h International Congress on Laser Advanced Materials Processing
影响因子：
0
作者：
M.;Mizoshiri;H.;Nishiyama;Y.;Hirata;J.;Nishii;T.;Kawahara;T.;Kawai
通讯作者：
Kawai

Formation of periodic structures by the space-selective precipitation of Ge nanoparticles in channel waveguides

通过通道波导中Ge纳米粒子的空间选择性沉淀形成周期性结构