Fabrication of field emission and microdischarge devices using femtosemnd laser lithop-aphy

使用飞秒激光光刻技术制造场发射和微放电装置

基本信息

批准号：
18360354
负责人：
HIRATA Yoshinori
金额：
$ 11.05万
依托单位：
Osaka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2006
资助国家：
日本
起止时间：
2006 至 2007
项目状态：
已结题

项目摘要

In this study, we fabricated field emission and micro-discharge devices using femtosecond laser lithography. The experimental results are as follows:1. Femtosecond laser lithographyWe proposed the combined process of femtosemnd laser-induced nonlinear lithography and etching processes. This process enables to fabricate microstructures onto nonpanar substrates, which is rather difficult for the conventional photolithography processes.2. Space-selective growth of carbon nanotubes on a microelectrode tipThe patterns were formed on Au thin films by field emitted electron beams extracted from the microelectrode tips overall coated with carbon nanotubes. We investigated the effect of curvature radius, gap length between electrodes and applied voltages on the microfabrication of Au thin films by field emitted electron beams. The increases of curvature radius and applied voltages were effective for pattern formation by field emission, resulting in the patterns of 2μm diameters were created. Carbon nanotubes were space-selectively grown only on the top part of a microelectrode tip. The patterns of approximately 2μm diameters could be formed by using the microelectrodes with CNTs.3. Arrayed microdischarge cavitiesArrays of hollow cathode microelectrode cavities were fabricated in Si wafers by semiconductor technology. The diameter of individual cavity was 30μm. Stable glow discharges were generated in atmospheric pressure of Ar gas. The patterns of 33 μm diameters were successfully formed on a resist thin film by using maskless microdischarge processes with O_2 and Ar mixed gas.

在这项研究中，我们使用飞秒板仪制造了田间发射和微设备。通过从碳纳米管涂层的尖端提取的薄膜，我们研究了电极和施加的电压，并通过Auther d em -thin膜通过AUTHIN D发射的电子束在Au薄膜上进行了涂层。对于野外发射，形成了2μm直径的模式在AR气体的气动性Ssure中产生。

项目成果

期刊论文数量（0）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Field emission current and vacuum breakdown by a pointed cathode

DOI：
10.1016/j.tsf.2006.02.085
发表时间：
2007-03
期刊：
Thin Solid Films
影响因子：
2.1
作者：
Y. Hirata;K. Ozaki;U. Ikeda;M. Mizoshiri
通讯作者：
Y. Hirata;K. Ozaki;U. Ikeda;M. Mizoshiri

Three-dimensional lithography using a self-trapped filament of femtosecond laser pulses

使用飞秒激光脉冲自陷灯丝进行三维光刻

DOI：
发表时间：
2006
期刊：
Proceedings of 41h International Congress on Laser Advanced Materials Processing
影响因子：
0
作者：
M.;Mizoshiri;H.;Nishiyama;Y.;Hirata;J.;Nishii;T.;Kawahara;T.;Kawai
通讯作者：
Kawai

Formation of periodic structures by the space-selective precipitation of Ge nanoparticles in channel waveguides

通过通道波导中Ge纳米粒子的空间选择性沉淀形成周期性结构