Research on Micro-Thermal Materials Processing with Pulsed Field Emission Current

脉冲场发射电流微热材料加工研究

基本信息

批准号：
14350387
负责人：
HIRATA Yoshinori
金额：
$ 10.69万
依托单位：
Osaka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2004
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-14350387/
关键词：
Field emission Precise thermal materials processing In-situ observation by SEM Carbon-Nano-Tube Vacuum breakdown Melt spot Work function FN plot 電解放出放電プラズマCVD 入熱分布

项目摘要

In this project the fundamental experiments were carried out to make clear the problems and the mechanisms of the precise thermal materials processing in micro-meter to nano-meter size with high density field emission current. The results obtained are summarized as follows :1.Theoretical prediction of field emission current from a pointed cathode coated with Carbon-Nano-Tube(CNT)The electron current distribution field-emitted from a pointed cathode, of which surface was coated by CNT on the substrate of nickel, was theoretically calculated using Fowler-Nordheim equation. The cathode shape was assumed to be axial symmetric hyperbola. The current distribution on the anode surface is varied depending on the gap length and the tip radius of the cathode.2.Measurement of field emission current from a pointed cathode coated with CNTThe field emission current was precisely measured in the range of 0.1 to 2 μm of the gap length between the cathode and stainless steel anode by applying the sinus … More oidal wave voltage. The current measured increases exponentially with increase of applied voltage. Then, the current was confirmed to be field emission current with the aid of FN plotting. The theoretical prediction of the relationship between the field emission current and the parameters such as gap length and tip radius qualitatively accorded with that by measurement. However, the current value by the measurement was higher than the calculation. It is necessary to make clear the equivalent work function of CNT and/or to treat the cathode shape carefully in the next stage of the research.3.Precise thermal materials processing by field emission currentThe precise materials processing by field emission current was tried with the CNT coated cathode in the SEM vacuum environment. The experiment showed that the melt spot was formed on the surface of stainless anode only when the electrical breakdown between both electrodes occurred. Then, it is necessary to make higher current density on the anode surface in the next stage of the research. Less

在该项目中，进行了基本实验，以清除微米中的精确热材料加工到纳米米大小的问题和机制，并具有高密度场发射电流。所获得的结果总结如下：1。从尖的阴极涂有碳纳米管（CNT）的磁场发射电流的理论预测。从尖的阴极中发出的电子电流分布场，该表面由CNT涂在镍的底物上，使用Fowller-Nordheim equy计算出镍的底物，使用Fowller-Nordheim equaration计算。假定阴极形状为轴向对称双曲线。阳极表面上的电流分布因间隙的长度和阴极的尖端半径而变化。2。磁场发射电流的测量来自带有cnt的尖尖阴极的磁场发射电流，通过在阴极和粘液的钢板之间的间隙长度范围为0.1至2μm，通过施加sinus sinus sinus sinus Wave，精确测量了0.1至2μm的间隙长度。当前测量的电流随着施加电压的增加而指数增加。然后，借助FN绘图，确认电流为现场发射电流。磁场发射电流与参数（例如间隙长度和尖端半径）在定性上根据测量的理论预测。但是，测量值的电流值高于计算。有必要在下一阶段清楚地清楚CNT和/或仔细处理阴极形状的等效功能。3。通过田间发射电流处理的Precise Thermal Producation Process of Field材料在SEM真空环境中使用CNT涂层阴极进行了田间发射电流的精确材料处理。该实验表明，仅当两种电极之间的电衰竭时，熔体斑点才在不锈子阳极的表面形成。然后，有必要在研究的下一个阶段使阳极表面上的较高电流密度。较少的