Development of an optical interference micro accelerometer with automatic tuning system

具有自动调谐系统的光学干涉微加速度计的研制

• 批准号: 16360446
• 负责人: ASANUMA Hiroshi
• 金额: $ 6.98万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2004
• 资助国家: 日本
• 起止时间: 2004 至 2005
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-16360446/
• 关键词: microsensor; accelerometer; FPI; operating point; automatic tuning; MEMS

This research was carried out to develop an optical interference micro accelerometer with automatic tuning system. Major results from this project are as follows :1. Investigation of the automatic tuning system.(1), Mechanism and logic to automatically tune the sensitivity of the sensor was theoretically and experimentally investigated. Prototype system with hardware and software was made to examine its performance.2. Fabrication of the prototype(1), A prototype the automatic tuning system was fabricated using the MEMS technologies. The effect of the tunig and improvement of the performance was examined.3. Investigation on the multiplexing(1), Methods for multisensor measurement system and multiplex transmission of the optical signal was investigated and prototype system was manufactured. (2), Its performance was investigated in borehole, water and subsurface4. Summary.(1), Design methodology, MEMS process, software, optical system was summarized for future industrial production. (2), The main results from this project were submitted to appropriate international journal.

本研究旨在开发一种具有自动调谐系统的光学干涉微型加速度计。本项目的主要成果如下： 1．自动调谐系统的研究。(1)、对传感器灵敏度自动调谐的机制和逻辑进行了理论和实验研究。制作了硬件和软件原型系统并检验其性能； 2．原型的制作(1)，使用 MEMS 技术制作自动调谐系统的原型。检验了调整后的效果以及性能的提高。 3．复用研究(1)，研究了多传感器测量系统和光信号复用传输的方法，并制造了原型系统。 (2)、在钻孔、水中和地下4中对其性能进行了研究。总结：(1)、对设计方法、MEMS工艺、软件、光学系统进行总结，为今后的工业化生产提供参考。 (2)、本项目的主要成果已提交给相应的国际期刊。

项目成果

Development of an optical micro AE sensor with an automatic tuning system

开发具有自动调谐系统的光学微型AE传感器

• 发表时间: 2006
• 期刊: Journal of Acoustic Emission (印刷中)
• 作者: Tsutsumi;S.;Murakam;K.;Tokuda;C.;Nakayama;Y.;Yajima;D.;Toyosada;M.;H.Asanuma
• 通讯作者: H.Asanuma

Automatic tuning of an optical ultrasonic microsensor based on the Fabry-Perot interferometer

基于法布里-珀罗干涉仪的光学超声微传感器的自动调谐

• 发表时间: 2004
• 期刊: Proc 9th International Conference on Optical MEMS and Their Applications
• 作者: H.Asanuma;H.Ohishi;H.Niitsuma
• 通讯作者: H.Niitsuma