Development of Mechanical and Fatigue Testing System for Micro Elements

微元件力学与疲劳测试系统的研制

基本信息

批准号：
16360054
负责人：
MINOSHIMA Kohji
金额：
$ 9.73万
依托单位：
Osaka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2004
资助国家：
日本
起止时间：
2004 至 2006
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-16360054/
关键词：
Micro Materials Thin Film Fatigue Mechanical Properties Tensile Strength Bending Strength Size Effects Micro Elements 引張負荷曲げ負荷環境効果

项目摘要

In order to develop a reliable micro system in a service operation, much care must be taken into micro mechanical evaluation, i.e., mechanical properties of μm-sized microelements including fatigue behavior. However, the evaluation method has not yet been established. In this investigation, mechanical testing systems for microelements under tensile and bending loads have been developed, and thereby fatigue testing at 1-200 Hz is possible. Moreover, mechanical tests were conducted for SiN thin films of 1 μm and 3 μm thick, and the effects of sample size and loading mode were investigated : the tensile strength increased with a decrease in sample size. However, the elastic modulus was independent of sample size, although it is dependent on a deposition method. Bending strength is less dependent on the sample size compared with those under tensile loading. However, the bending strength was higher than the tensile strength, indicating that the strength of a microelement is highly dependent on the loading mode. Moreover, the influence of micro artificial defect and fatigue loading on an optical fiber was investigated. The tensile strength was extremely sensitive to an environment, and the tensile strength decreased by moisture containing even in a vacuum at 10^<-5> Pa : the strength decreased with an increase in a partial pressure of water molecule and with a decrease in loading rate under both monotonic and cyclic fatigue loading. The estimation method for evaluating the life under constant and cyclic fatigue loading was proposed. The method was based upon evaluating a crack growth law, derived by tensile tests and slow strain rate tensile testing, and the life evaluated by using the proposed method agreed with experimental data.

为了在服务操作中开发可靠的微型系统，必须在微型机械评估中要小心，即μM大小的微元素（包括疲劳行为）的机械性能。但是，尚未确定评估方法。在这项研究中，已经开发了用于拉伸和弯曲负荷下的微元素的机械测试系统，从而可以在1-200 Hz处进行疲劳测试。此外，对1μm和3μm厚的SIN薄膜进行了机械测试，并投资了样本量和加载模式的影响：拉伸强度随着样本量的减少而增加。但是，弹性模量与样本量无关，尽管它取决于沉积方法。与拉伸负荷下的弯曲强度相比，弯曲强度依赖于样本量。但是，弯曲强度高于拉伸强度，表明微元素的强度高度取决于加载模式。此外，研究了微人工缺陷和疲劳负荷对光纤的影响。拉伸强度对环境极为敏感，即使在10^<-5> PA的真空中，含水分也会降低，而在单调和环状疲劳负荷下，水分子的分压和载荷率降低，强度随着水分分子的部分压力而降低。提出了用于评估恒定和循环疲劳负荷下寿命的估计方法。该方法基于评估裂纹生长定律，该定律是通过拉伸测试和缓慢的应变速率拉伸测试得出的，以及使用所提出的方法与实验数据一致的寿命。