Investigation on Fracture Mechanisms and Size Effects of Nano-Films Using Nano-Mechanical Testing System based upon in-situ Observations and Analyses

基于原位观察和分析的纳米力学测试系统研究纳米薄膜的断裂机制和尺寸效应

• 批准号: 23246026
• 负责人: MINOSHIMA Kohji
• 金额: $ 32.7万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2011
• 资助国家: 日本
• 起止时间: 2011-04-01 至 2014-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-23246026/
• 关键词: マイクロ材料力学; 材料強度学; 薄膜; 破壊; 疲労; クリープ; マイクロ材料強度学; 強度; マイクロ材料力学; 材料強度学; 薄膜; 破壊; 疲労; クリープ; マイクロ材料強度学; 強度

We developed an experimental setup for clarifying the mechanics and mechanisms of fracture in freestanding submicron-thick metallic films. This system can conduct in situ FESEM observation of deformation/fracture and EBSD crystallographic analysis on the local region at stress concentration sites such as crack tips under controlled mechanical conditions. Systematic experiments clarified the thickness effect on fracture toughness in copper nano-films where the fracture toughness decreases with a decrease in thickness, the characteristic fatigue crack growth mechanism of copper films where a fatigue crack propagates through intrusions/extrusions formed ahead of the crack tip, the presence of fatigue crack closure and the impact on the fatigue crack propagation property, and the effect of thickness on creep properties of aluminum nano-films.

我们开发了一个实验设置，用于阐明独立式亚厚金属膜中断裂的机制和机制。该系统可以在应力浓度位点（例如受控机械条件下的裂纹尖端）对局部区域进行变形/断裂和EBSD晶体学分析的原位观察。有系统的实验阐明了铜纳米膜中厚度对断裂韧性的影响，在铜纳米膜中，断裂韧性随着厚度的降低而降低，铜膜的特征性疲劳裂纹生长机制，疲劳裂纹通过侵入式裂缝构成的裂缝构成的特性构成易受裂缝的裂缝，构成易于裂缝的裂纹，构成的裂纹，构成易受裂缝的裂缝，构成的裂纹，构成的裂纹，构成的裂纹，构成的裂纹，构成的裂纹，构成的裂纹，构成的裂纹，构成的裂纹，构成易受的裂纹，构成易受的裂纹，并构成易受裂缝铝纳米膜。