Development of high-functional optical and biological devices by ultra precise micro dies.

利用超精密微型模具开发高功能光学和生物器件。

• 批准号: 16310100
• 负责人: OOHIRA Fumikazu
• 金额: $ 9.86万
• 依托单位: Kagawa University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2004
• 资助国家: 日本
• 起止时间: 2004 至 2006
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-16310100/
• 关键词: micro dies; optical device; biological device; micro shape formation; transfer technology; nano inprint; optical waveguide; micro lens.; バイオチップ; 精密金型; マイクロマシン; フォトリソ技術; 光部品; 光導波; ナノテクノロジー; 成形技術; 光導波路

This research aims to realize high-functional optical and biological devices using precise micro dies.1. Precise Micro diesVery precise micro dies have been realized for the optical and biological devices by the newly developed Si 3D shape formation, thin film deposition, and micro electroplating technologies.(1) Micro dies for optical devices・Micro dies for the AWG (Arrayed Waveguide Grating) device have been designed and fabricated. The mother shape has been fabricated by the Si micro machining, and the shape has been fabricated by using also the SU-8 resist.・The micro die for the micro lens has been designed and fabricated considering the laser diode. By the electroplating technique, the micro die for the UV cure material has been realized.・The micro die with the sub-micron size gap pillars has been realized. The high aspect ratio pillar shapes could be transferred by the micro electroplating.(2) Micro dies for biological devices2. Optical and biological devicesThe plastic devices were fabricated by using the micro dies mentioned above.(1) Optical devices・The fabrication processes and conditions such as vacuum were optimized, and the AWG with the core size of 5 microns has been fabricated.・The feasibility of the mono-molecular layer thin film has been examined for the removal use of the micro dies.・The optical characteristics of the micro lens has been evaluated.(2) Biological devices・The insert process has been examined using the nano-inprint technology, and the biological chips have been fabricated with the very narrow gaps between the pillars. As the result, the shape transform of the aspect ratio of about 1 has been realized.As the result, using the technologies developed in this study, the high functional devices could be realized.

这项研究旨在使用精确的微型模具实现高生产力。并通过使用Su-8抗性来实现uv固化材料的su-8。使用微型模具（1）光学设备。评估的精神病学和生物芯片已被柱子之间的狭窄缝隙制成。