Preparation of Metal-Oxide nano-granular thin films with soft magnetic property by wet process

湿法制备软磁金属氧化物纳米颗粒薄膜

基本信息

批准号：
14550313
负责人：
FUJITA Naoyuki
金额：
$ 2.3万
依托单位：
Osaka Prefectural College of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2003
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14550313/
关键词：
Metal-oxide co-electrodeposition granular film magnetic property Fe-Ce-O Co-Pt electrodeposition Fe-Pt電析

项目摘要

Metal-oxide nano-granular film consisting of nanometer-sized magnetic metal particles embedded in an oxide matrix has soft magnetic property and high electrical resistance. Therefore these films have attracted much attention as materials for the micro magnetic devices operated at high frequency. Metal-oxide nano-granular films have typically been fabricated by sputtering. We have demonstrated that Co-Ce-0 films could be fabricated from the reaction solution containing CoSO_4 and Ce(NO_3)_3 or CeCl_3 by the electrochemical method, call as "metal-oxide co-electrodeposition". However minimum coercivity of these films remained 160 Oe. The aim of this project is to be obtained metal-oxide nano-granular films with good soft magnetic properties by electrochemical method. In this project, we tried the following four approaches for obtaining good magnetic properties:1)Fabrication of Fe-Ce-O films by electrochemical method.2)Irradiation of ultrasonic during electrodeposition3)Using the pulse wave current for electrodeposition4)Electrodeposition of Co-alloy.The following results were derived:1)Fe-Ce-0 granular films have been formed successfully by metal-oxide co-electrodeposition from a reaction solution containing FeSO_4, CeCl_3, L-ascorbic acid, and (NH_4)_2SO_4. L-ascorbic acid acts as antioxidant and avoid being oxidized Fe^<2+> to Fe^<3+>. (NH_4)_2 SO^_4 acts as a complexing agent for Fe^<2+> and avoid the precipitation of Fe(OH)_2. Coercivity of Fe-Ce-0 films with 50 Oe is smaller than Co-Ce-0 films.2)Co-Pt film were prepared by electrodeposition. The Co content in the films was varied from 24 to 57 at.% by controlling the concentration of Co^<2+> in a plating bath. Annealing of the as-deposited films including 24-50 at.% Co transformed their crystal structure from the face-centered-cubic structure (fee) to the ordered face-centered-tetragonal L10 structure (fct), and the coercivity up to approximately 880 kA/m was obtained.

金属氧化物纳米粒状膜由嵌入氧化物基质中的纳米尺寸磁性金属颗粒组成，具有软磁性特性和高电阻。因此，这些薄膜吸引了以高频操作的微磁性设备的材料引起了很多关注。金属氧化物纳米粒状膜通常是通过溅射制造的。我们已经证明，可以通过含有coso_4和ce（no_3）_3或Cecl_3的反应溶液来制造CO-CE-0薄膜，或通过电化学方法称为“金属氧化物共同沉积”。但是，这些薄膜的最低矫正率仍为160 OE。该项目的目的是通过电化学方法获得具有良好软磁性特性的金属氧化纳米粒状膜。在该项目中，我们尝试了以下四种方法来获得良好的磁性特性：1）通过电化学方法制造Fe-CE-O膜的制造。2）在电沉积过程中超声辐射的超声辐射3）使用脉搏波电流进行电沉积4）co-Alloy的电沉积。通过co-Alloy的电沉积。通过以下结果促进了以下结果：1）Fe-ce-0 granoluct granquist a nory a nity ATERITY ATERIDERIDE gRANELARED GRANERALE COROD tORIDES ATER RIDENRODS-EL ATER RITARCORTRODS-EL-EL构成，是元素的粒度胶片，并将其构成一A。包含FESO_4，CECL_3，L-抗坏血酸和（NH_4）_2SO_4的解决方案。 L-抗坏血酸充当抗氧化剂，避免被氧化为Fe^<2+> fe^<3+>。（nh_4）_2 so^_4充当Fe^<2+>的络合剂，并避免Fe（OH）_2的沉淀。使用50 OE的FE-CE-0膜的凝固性小于CO-CE-0膜小。通过控制镀金浴中的co^<2+>的浓度，膜中的CO含量从24到57 at。％变化。将包括24-50 at的AT。％CO在内的AS沉积膜退火将其晶体结构从面部中心的立方体结构（费用）转变为以面部为中心的四方L10结构（FCT），并获得了大约880 ka/m的固定性。