Development of fast high-sensitivity scanning charge microscope

快速高灵敏度扫描电荷显微镜的研制

• 批准号: 12355002
• 负责人: SHIMADA Hiroshi
• 金额: $ 13.6万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12355002/
• 关键词: single-electron transistor; scanning probe microscope; charge microscope; fast measurement; optical fiber; 単一トランジスタ

The goal of this project is to develop a versatile fast scanning charge microscope which utilizes the single-electron transistor as its charge sensor and works at 2K. We have introduced a low-temperature scanning shear-force microscope as the basic servo scanning system for the charge microscope. The shear force microscope uses as its force sensor a sharpened optical fiber that is fixed on a quartz oscillator on the sensor head. We have developed a fabrication process of a single-electron transistor on the tip of the sharpened optical fiber. The process comprises a sharpening process of an optical fiber by using a selective etching technique of a dispersion- compensation fiber, and a formation of double small tunnel junctions on the tip of the sharpened fiber mostly by means of a vacuum-evaporation deposition.We have also developed versatile fast-measuring circuits of the single-electron transistor. The main part of the circuits is a current amplifier that is composed of an operational amplifier (opamp) and it measures a conductance of a measured device. Generally a conductance measurement with a voltage biasing is less influenced by the stray capacitance of the signal cable than the resistance measurement with a current biasing. We have further reduced the influence of the stray capacitance of the signal cable by using a C-MOS based opamp (TLC4501) and putting the amplifier near the sensor device in liquid He and making the signal cable short, or by using a tri-axial signal cable and driving its middle conductor with a voltage follower at the voltage of the signal line and reducing the stray capacitance effectively.Unfortunately we have spent a lot of effort and time on the development of the fabrication process of the charge sensor, and we have not succeeded in integrating all the elements described above and constructing the charge microscope itself during the period of the project.

该项目的目标是开发一种多功能快速扫描电荷显微镜，它利用单电子晶体管作为电荷传感器，工作温度为2K。我们推出了低温扫描剪切力显微镜作为电荷显微镜的基本伺服扫描系统。剪切力显微镜使用固定在传感器头上的石英振荡器上的锋利光纤作为其力传感器。我们开发了一种在尖锐光纤尖端上制造单电子晶体管的工艺。该工艺包括使用色散补偿光纤的选择性蚀刻技术对光纤进行锐化处理，以及主要通过真空蒸发沉积在锐化光纤的尖端上形成双小隧道结。还开发了单电子晶体管的多功能快速测量电路。该电路的主要部分是由运算放大器（opamp）组成的电流放大器，用于测量被测器件的电导。通常，与使用电流偏置的电阻测量相比，使用电压偏置的电导测量受信号电缆的杂散电容的影响较小。我们通过使用基于 C-MOS 的运算放大器 (TLC4501) 并将放大器放置在液氦中靠近传感器器件并缩短信号电缆，或者使用三轴放大器，进一步减少了信号电缆杂散电容的影响。信号电缆，并用电压跟随器在信号线的电压下驱动其中间导体，有效地减少杂散电容。不幸的是，我们在电荷传感器的制造工艺的开发上花费了大量的精力和时间，并且我们已经没有整合成功上述所有要素以及在项目期间构建电荷显微镜本身。

项目成果

H.Shimada, K.Ono, Y.Ootuka: "Driving the single-electron device with a magnetic field"Journal of Applied Physics.. 93巻・10号. (2003)

H.Shimada、K.Ono、Y.Ootuka：“用磁场驱动单电子装置”应用物理杂志。第 93 卷，第 10 期。（2003 年）

Driving the single-electron device with a magnetic field

用磁场驱动单电子器件

• 发表时间: 2003
• 期刊: Journal of Applied Physics 93巻・10号
• 作者: H.Shimada;K.Ono;Y.Ootuka
• 通讯作者: Y.Ootuka