Measurement of the absolute cross sections for the electron collosion excitation of metastable states of rare-gases using a high-sensitivity FM-absorption methdo

使用高灵敏度调频吸收法测量稀有气体亚稳态电子碰撞激发的绝对截面

基本信息

批准号：
60550021
负责人：
TACHIBANA Kunihide
金额：
$ 0.9万
依托单位：
Kyoto Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1985
资助国家：
日本
起止时间：
1985 至 1987
项目状态：
已结题

项目摘要

A sensitive and accurate method has been developed for the detection of the excited rare-gas atoms in the metastable and resonance levels using a diode laser as a tunable light source for the absorption measurement. Then, the hyperfine structures and line shapes of the absorption spectral lines of Ar, Kr, and Xe have been analyzed by scanning the wavelength of the laser and the collision broadening- and shift-coefficients have been derived, which are necessary for the derivation of the absolute densities of the excited atoms from the line absorption data.On the other hand, a set up for the electron swarm experiment has been constructed by improving the electron drift-tube equipped with an ultra-high vacuum system which can supply relatively high and stable photo-current for a long period. By compbining the drift-tube and the laser absorption technique we have measured the excitation coefficients for the metastable and resonance levels of Ne, Ar, Kr, and Xe as functions of the ratio of the electric field strength to the gas density.The measured excitation coefficients have been compared with the calculated results obtained from the Boltzmann equation analysis using a trial set of cross sections for each rare-gas. From the comparison absolute values of the cross sections for the excited levels have been determined.As for the application of the obtained excitation coefficients or the cross sections, we have tried to use those values in the simulations of gas discharges in mixtures of rare-gases with other gases which are used, e.g., for the plasma display for a color TV and the plasma CVD for the preparation of various thin films.

已经开发出一种灵敏且准确的方法，用于使用二极管激光器作为吸收测量的可调光源来检测亚稳态和共振能级中激发的稀有气体原子。然后，通过扫描激光波长分析了Ar、Kr和Xe吸收谱线的超精细结构和线形，并导出了碰撞展宽和位移系数，这是推导所必需的另一方面，通过改进配备超高真空系统的电子漂移管，构建了电子群实验装置，可以提供相对较高的真空度。稳定的光电流很长一段时间内。通过结合漂移管和激光吸收技术，我们测量了 Ne、Ar、Kr 和 Xe 的亚稳态和共振能级的激发系数，作为电场强度与气体密度之比的函数。测量的激发使用每种稀有气体的一组试验横截面，将系数与通过玻尔兹曼方程分析获得的计算结果进行了比较。通过比较，确定了激发能级截面的绝对值。至于所获得的激发系数或截面的应用，我们尝试将这些值用于稀有气体混合物中气体放电的模拟与其他气体一起使用，例如用于彩色电视的等离子体显示器和用于制备各种薄膜的等离子体CVD。