Development of environmentally robust and thermally stable Microelectromechanical Systems (MEMS) based accelerometer for automotive applications

开发适用于汽车应用的环境稳定且热稳定的微机电系统 (MEMS) 加速度计

• 批准号: 566730-2021
• 负责人: Ahamed, MohammedMJ
• 金额: $ 2.17万
• 依托单位: University of Windsor
• 依托单位国家: 加拿大
• 项目类别: Alliance Grants
• 财政年份: 2022
• 资助国家: 加拿大
• 起止时间: 2022-01-01 至 2023-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=760459
• 关键词: Development; environmentally; robust; thermally; stable

The goal of this partnership is to develop a cost effective, stable and shock immune micro accelerometers for automotive applications. Microelectromechanical systems (MEMS) based accelerometers are small sensors that can detect small inertial movements. They are widely used in automotive such as for stability control, air-bag deployment and crash detection. Automotive applications require accelerometers to work in quite harsh environment involving vibration, shock, temperature, and thermal cycling. Despite the surge in low-cost MEMS accelerometers, they still suffer from low temperature stability, noise and shock immunity. With the ever-increasing thrust for autonomy and electrification of vehicles the demand for precision, robust but cost-effective sensors is growing. MEMS accelerometers use a resonating silicon mass as the sensing element. The major issue with the silicon-based MEMS resonator is its inherent low thermal stability. Currently, there is no fixed design approach available to enhance the stability and shock immunity in cost-effective MEMS accelerometers. To overcome the above-mentioned limitations, this research aims to take a ground-breaking approach by utilizing robust mechanical materials combined with novel sensor design to achieve thermal and shock stability as well as lower the cost. This NSERC Alliance grant will be a first-time collaboration between the partner industries and the University of Windsor to develop a robust MEMS based accelerometer for temperature and shock stability. It is also expected to create a ripple effect in other similar automotive inertial sensors including gyroscopes and inertial measurement units. There will be major benefits to Canadians as it will directly assist the innovation of much-needed high-performance and cost-effective micro-sensor systems in the emerging area of autonomous navigation, and it is expected to increase Canada's competitiveness in this area. It will put Canada in a leadership role in the global arena in the high precision and stable acceleration sensor development.

此次合作的目标是为汽车应用开发具有成本效益、稳定且抗冲击的微型加速度计。基于微机电系统 (MEMS) 的加速度计是可以检测微小惯性运动的小型传感器。它们广泛应用于汽车领域，例如稳定性控制、安全气囊展开和碰撞检测。汽车应用要求加速度计在振动、冲击、温度和热循环等相当恶劣的环境下工作。尽管低成本 MEMS 加速度计激增，但它们仍然存在低温稳定性、噪声和抗冲击性等问题。随着汽车自动化和电气化的不断发展，对精确、坚固且具有成本效益的传感器的需求不断增长。 MEMS 加速度计使用谐振硅块作为传感元件。硅基 MEMS 谐振器的主要问题是其固有的低热稳定性。目前，还没有固定的设计方法可用于增强经济高效的 MEMS 加速度计的稳定性和抗冲击性。为了克服上述限制，本研究旨在采取突破性的方法，利用坚固的机械材料与新颖的传感器设计相结合，以实现热稳定性和冲击稳定性并降低成本。 NSERC 联盟的这项资助将是合作伙伴行业与温莎大学之间的首次合作，旨在开发一种强大的基于 MEMS 的加速度计，以实现温度和冲击稳定性。预计它还会在其他类似的汽车惯性传感器（包括陀螺仪和惯性测量单元）中产生连锁反应。这对加拿大人来说将是重大利益，因为它将直接协助自主导航新兴领域急需的高性能和具有成本效益的微型传感器系统的创新，并有望提高加拿大在该领域的竞争力。它将使加拿大在高精度和稳定的加速度传感器开发领域处于全球领先地位。