Fatigue Characteristics of Silicon Micromechanism for Micromachine

微机械用硅微机构的疲劳特性

• 批准号: 09650117
• 负责人: TSUJI Hirokazu
• 金额: $ 0.77万
• 依托单位: Tokyo Denki University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09650117/
• 关键词: Micromachine; Micromechanism; Fatigue; Micromaterial; Fatigue test; Single-crystalline silicon; 疲労試験機

A fatigue-testing machine based on four-point bending was developed for micromaterials and micromechanisms. Cyclic loads were applied to a specimen by means of a piezo-electric actuator, which can control the displacement of the specimen with high resolution and frequency. Displacement of the specimen was measured by the optical interferometer combined with the computer image processing technique. A microscope and a CCD TV camera were used to obtain interference fringes, and the shutter of the camera was synchronized to the loading signal for the real-time processing of the cyclic displacement of the specimen. Basic tests were conducted with a smoothed specimen fabricated by dicing from a silicon wafer, and it was confirmed that the fatigue-testing machine satisfies the specifications needed. Two types of specimens were prepared to be used in the micromaterial fatigue testing, one was a notched type specimen and another was a smoothed film type one. These specimens were fabricated from silicon wafers by micromachining, such as PVD and the photo-etching process. In order to evaluate the key process of micromachining, the anisotropic etching process for a single silicon crystal was studied to determine the etching condition, so that the specimens with accurate geometry and dimensions could be performed.

针对微材料和微观力学开发了基于四点弯曲的疲劳测试机。通过压电电动执行器将循环载荷施加到样品上，该执行器可以以高分辨率和频率控制样品的位移。样品的位移是通过光学干涉仪与计算机图像处理技术结合的。使用显微镜和CCD电视摄像头获取干扰条纹，并将摄像头的快门同步到加载信号，以实时处理样品的循环位移。通过通过硅晶片的迪卡制成的平滑样品进行了基本测试，并确认疲劳测试机满足了所需的规格。准备两种样品用于微材料疲劳测试中，一种是缺口型样品，另一种是平滑的膜型样本。这些标本是用微加工用硅晶片制成的，例如PVD和光蚀刻过程。为了评估微加工的关键过程，研究了单个硅晶体的各向异性蚀刻过程以确定蚀刻条件，以便可以执行具有准确的几何形状和尺寸的样品。

项目成果

遠藤, 小森, 辻: "ピエゾアクチュエータを用いた微小材料試験機の開発" 日本機械学会関東支部ブロック合同講演会-'97桐生 講演論文集. 180-181 (1997)

Endo、Komori、Tsuji：“使用压电执行器开发微材料测试机”日本机械工程师学会关东分会联合讲座 - 97 Kiryu 讲座论文集 180-181 (1997)。

遠藤、小森、辻: "ピエゾアクチュエータを用いた微小材料試験機の開発" 日本機械学会関東支部ブロック合同講演会講演論文集. 180-181 (1997)

Endo、Komori 和 Tsuji：“使用压电执行器的微材料测试机的开发”日本机械工程师学会关东分会联合讲座会议记录 180-181（1997 年）。

遠藤, 小森, 辻: "ピエゾアクチュエータを用いた微小材料試験機の開発" 日本機械学会関東支部ブロック合同講演会講演論文集. 180-181 (1997)

Endo、Komori、Tsuji：“使用压电执行器的微材料测试机的开发”日本机械工程师学会关东分会联合讲座会议记录 180-181（1997 年）。