Research and Development of Adhesive Bonding Device for Microfabrication

微细加工粘接装置的研究与开发

基本信息

批准号：
16560126
负责人：
NAKAZATO Yuichi
金额：
$ 1.92万
依托单位：
Nippon Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2004
资助国家：
日本
起止时间：
2004 至 2005
项目状态：
已结题

项目摘要

The fabrication of microsized structures has been realized by the use of IC technology, such as photofabrication, and fine gears and shafts have been fabricated on a Si substrate. Although structures with sizes of approximately 10 μm to 100 μm can be observed using the current technology, structures with sizes in the range from 10 μm to 100 μm are considered to be difficult to manipulate ; thus, this range is called the "unmanipulable" range. Therefore, manipulators for handling structures of these sizes are required. However, if microsized structures are handled using these manipulators and assembled by fitting them into each other to form a micromechanism, an extremely small dimensional tolerance is required, which is difficult to realize. We proposed that microsized structures can be assembled by adhesive bonding because of the scale effect, and hence evaluated a method for fixing microsized structures using an adhesive.In 2004, a fabrication method of discharge nozzles and their shapes were studied. From various experiments, we found that a glass thin tube can be fabricated relatively simply and effectively by heating and rapid withdrawal. Subsequently, the effect of the inner diameter of the discharge nozzle on the size of droplets discharged was studied. The size of droplets discharged decreased when the inner diameter of the discharge nozzle was reduced from 10 μm to 2 μm. In particular, when the inner diameter was 5 μm or less, the size of the droplet decreased markedly, and a droplet with a diameter of 10 μm or less was observed. In 2005, by devising the nozzle shape, the discharge of droplets with a diameter of approximately 1 μm was realized. In conclusion, we established the fabrication method and effective shape of the nozzle of an adhesive discharge device, which are essential for the adhesive bonding of microsized structures.

微型结构的制造已经通过使用IC技术（例如光制造）实现，并且已经在Si基板上制造了精细的齿轮和轴，尽管使用当前的技术可以观察到尺寸约为10μm至100μm的结构。，尺寸在10μm到100μm范围内的结构被认为是难以操纵的，因此，这个范围被称为“不可操纵”范围，因此，用于搬运的机械手。然而，如果使用这些机械手处理微型结构并将它们相互装配以形成微型机构，则需要极小的尺寸公差，而这很难实现。由于尺寸效应，可以通过粘合剂粘合来组装，因此评估了使用粘合剂固定微型结构的方法。2004年，通过各种实验，我们研究了排出喷嘴的制造方法及其形状。通过加热和快速拉拔可以相对简单且有效地制造管，随后研究了排出喷嘴内径对排出液滴尺寸的影响。特别是，当内径为5μm以下时，液滴的尺寸显着减小，并且观察到直径为10μm以下的液滴。 2005年，通过对喷嘴形状的设计，实现了直径约1μm的液滴的排出。总之，我们建立了粘合剂排出装置喷嘴的制作方法和有效形状，这对于粘合剂的粘合至关重要。微型结构。

项目成果

期刊论文数量（60）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

微小物把持を目的にしたマイクロピンセットの形状検討

检查用于抓取小物体的微型镊子的形状

DOI：
发表时间：
2004
期刊：
日本機械学会2004年度年次大会講演論文集 7巻
影响因子：
0
作者：
今戸啓二;宮川浩臣;中里裕一;Yuichi NAKAZATO;Hajime MIYAZAWA;Yuichi NAKAZATO;Yuichi NAKAZATO;後藤剛紀;後藤剛紀;中里裕一;Yuichi NAKAZATO;Yuichi NAKAZATO;Takanori GOTO;Yuichi NAKAZATO;Hajime MIYAZAWA;Yuichi NAKAZATO;後藤剛紀;関根吾朗;後藤剛紀;YUichi NAKAZATO;Yuichi NAKAZATO;後藤剛紀;Yuichi NAKAZATO;Yuichi NAKAZATO;Takanori GOTO;Takanori GOTO;Yuichi NAKAZATO;関根吾朗;中里裕一
通讯作者：
中里裕一

接着によるマイクロ接合技術の開発

使用粘合剂的微粘合技术的开发

DOI：
发表时间：
2005
期刊：
日本機械学会関東支部第12期総会講演会講演論文集
影响因子：
0
作者：
今戸啓二;宮川浩臣;中里裕一;Yuichi NAKAZATO;Hajime MIYAZAWA;Yuichi NAKAZATO;Yuichi NAKAZATO;後藤剛紀;後藤剛紀;中里裕一
通讯作者：
中里裕一

Development of SMA-drive micromanipulator with an end effector made of thick diamond film

开发带有厚金刚石薄膜末端执行器的 SMA 驱动微操作器

DOI：
发表时间：
2004
期刊：
Proceedings of 11th IFToMM World Congress in Me chanism and Machine Science (CD-ROM)
影响因子：
0
作者：
今戸啓二;宮川浩臣;中里裕一;Yuichi NAKAZATO;Hajime MIYAZAWA;Yuichi NAKAZATO;Yuichi NAKAZATO;後藤剛紀;後藤剛紀;中里裕一;Yuichi NAKAZATO;Yuichi NAKAZATO;Takanori GOTO;Yuichi NAKAZATO;Hajime MIYAZAWA;Yuichi NAKAZATO;後藤剛紀;関根吾朗;後藤剛紀;YUichi NAKAZATO
通讯作者：
YUichi NAKAZATO

Study on the shape of discharge nozzle in adhesive injector

喷胶机喷嘴形状研究