Research and Development of Adhesive Bonding Device for Microfabrication

微细加工粘接装置的研究与开发

• 批准号: 16560126
• 负责人: NAKAZATO Yuichi
• 金额: $ 1.92万
• 依托单位: Nippon Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2004
• 资助国家: 日本
• 起止时间: 2004 至 2005
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-16560126/
• 关键词: Micromanipulator; Scale Effect; Surface Forces; Micromechanism; Gripping Mechanism; Adhesive; Microfabrication; Surface Tension; 把待機構

The fabrication of microsized structures has been realized by the use of IC technology, such as photofabrication, and fine gears and shafts have been fabricated on a Si substrate. Although structures with sizes of approximately 10 μm to 100 μm can be observed using the current technology, structures with sizes in the range from 10 μm to 100 μm are considered to be difficult to manipulate ; thus, this range is called the "unmanipulable" range. Therefore, manipulators for handling structures of these sizes are required. However, if microsized structures are handled using these manipulators and assembled by fitting them into each other to form a micromechanism, an extremely small dimensional tolerance is required, which is difficult to realize. We proposed that microsized structures can be assembled by adhesive bonding because of the scale effect, and hence evaluated a method for fixing microsized structures using an adhesive.In 2004, a fabrication method of discharge nozzles and their shapes were studied. From various experiments, we found that a glass thin tube can be fabricated relatively simply and effectively by heating and rapid withdrawal. Subsequently, the effect of the inner diameter of the discharge nozzle on the size of droplets discharged was studied. The size of droplets discharged decreased when the inner diameter of the discharge nozzle was reduced from 10 μm to 2 μm. In particular, when the inner diameter was 5 μm or less, the size of the droplet decreased markedly, and a droplet with a diameter of 10 μm or less was observed. In 2005, by devising the nozzle shape, the discharge of droplets with a diameter of approximately 1 μm was realized. In conclusion, we established the fabrication method and effective shape of the nozzle of an adhesive discharge device, which are essential for the adhesive bonding of microsized structures.

通过使用IC技术（例如光制剂），已经在SI基板上制造了微化结构的制造，例如光制剂和精细的齿轮和轴。尽管可以使用当前技术观察到大约10μm至100μm的结构，但尺寸在10μm到100μm的结构被认为很难操纵。因此，此范围称为“难以操纵”范围。因此，需要进行处理这些尺寸的结构的操纵器。但是，如果使用这些操纵器来处理微化结构，并通过将它们彼此拟合以形成微机械来组装，则需​​要一个极小的维耐受性，这很难实现。我们提出，由于比例效应，可以通过粘合键组装微覆盖结构，因此评估了一种使用粘合剂固定微化结构的方法。在2004年，排放喷嘴及其形状的制造方法是研究的。从各种实验中，我们发现可以通过加热和快速退出可以相对有效地制造玻璃细管。随后，排放喷嘴的内径对排放液滴的大小的影响进行了研究。当排放喷嘴的内径从10μm减少到2μm时，排出的液滴的大小减小。特别是，当内径为5μm时，液滴的大小显着降低，并且观察到直径为10μm或更少的液滴。在2005年，通过设计喷嘴形状，实现了直径约为1μm的液滴的排放。总之，我们建立了粘合剂放电装置喷嘴的制造方法和有效形状，这对于微化结构的粘合性键合至关重要。

项目成果

微小物把持を目的にしたマイクロピンセットの形状検討

检查用于抓取小物体的微型镊子的形状

• 发表时间: 2004
• 期刊: 日本機械学会2004年度年次大会講演論文集 7巻
• 作者: 今戸啓二;宮川浩臣;中里裕一;Yuichi NAKAZATO;Hajime MIYAZAWA;Yuichi NAKAZATO;Yuichi NAKAZATO;後藤剛紀;後藤剛紀;中里裕一;Yuichi NAKAZATO;Yuichi NAKAZATO;Takanori GOTO;Yuichi NAKAZATO;Hajime MIYAZAWA;Yuichi NAKAZATO;後藤剛紀;関根吾朗;後藤剛紀;YUichi NAKAZATO;Yuichi NAKAZATO;後藤剛紀;Yuichi NAKAZATO;Yuichi NAKAZATO;Takanori GOTO;Takanori GOTO;Yuichi NAKAZATO;関根吾朗;中里裕一
• 通讯作者: 中里裕一

接着によるマイクロ接合技術の開発

使用粘合剂的微粘合技术的开发

• 发表时间: 2005
• 期刊: 日本機械学会関東支部第12期総会講演会講演論文集
• 作者: 今戸啓二;宮川浩臣;中里裕一;Yuichi NAKAZATO;Hajime MIYAZAWA;Yuichi NAKAZATO;Yuichi NAKAZATO;後藤剛紀;後藤剛紀;中里裕一
• 通讯作者: 中里裕一

Development of SMA-drive micromanipulator with an end effector made of thick diamond film

开发带有厚金刚石薄膜末端执行器的 SMA 驱动微操作器

• 发表时间: 2004
• 期刊: Proceedings of 11th IFToMM World Congress in Me chanism and Machine Science (CD-ROM)
• 作者: 今戸啓二;宮川浩臣;中里裕一;Yuichi NAKAZATO;Hajime MIYAZAWA;Yuichi NAKAZATO;Yuichi NAKAZATO;後藤剛紀;後藤剛紀;中里裕一;Yuichi NAKAZATO;Yuichi NAKAZATO;Takanori GOTO;Yuichi NAKAZATO;Hajime MIYAZAWA;Yuichi NAKAZATO;後藤剛紀;関根吾朗;後藤剛紀;YUichi NAKAZATO
• 通讯作者: YUichi NAKAZATO

微少量接着剤吐出装置の開発(微小ピペット先端形状が吐出する液滴に及ぼす影響)

微量粘合剂分配装置的开发（微量移液器尖端形状对喷射液滴的影响）

• 发表时间: 2005
• 期刊: 日本機械学会2005年度第1回年埼玉ブロック講演会講演論文集
• 作者: 今戸啓二;宮川浩臣;中里裕一;Yuichi NAKAZATO;Hajime MIYAZAWA;Yuichi NAKAZATO;Yuichi NAKAZATO;後藤剛紀;後藤剛紀
• 通讯作者: 後藤剛紀

Study on the shape of discharge nozzle in adhesive injector

喷胶机喷嘴形状研究

• 发表时间: 2006
• 期刊: The 6^<th> Machine Design and Tribology Division Meeting in JSME
• 作者: 今戸啓二;宮川浩臣;中里裕一;Yuichi NAKAZATO
• 通讯作者: Yuichi NAKAZATO