DEVELOPMENT OF MULTI-ANODE ARC DISCHARGE PLASMA JET CVD APPARATUS FOR DIAMOND SYNTHESIS

金刚石合成多阳极电弧放电等离子体喷射CVD装置的研制

• 批准号: 09355005
• 负责人: YOSHIKAWA Masanori
• 金额: $ 16.9万
• 依托单位: TOKYO INSTITUTE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09355005/
• 关键词: ARC DISCHARGE; PLASMA JET; DIAMOND; DIAMOND LIKE CARBON; 気相合成

This research aimed to develop a synthesis apparatus of high purity diamond and diamond like carbon film at higher growth rate on large area. The apparatus developed consists of a plasma source, power supply, gas feed system, vacuum system, cooling system and a reaction chamber. Connection flanges for the plasma source to activate carbon atoms and an ion beam source to sputter graphite target, a window for laser beam are mounted on the reaction chamber wall. Diamond and diamond like carbon films are synthesized from carbon atoms vaporized by ion beam sputtering or laser ablation, which activated with plasma jet includes electron up to 80A.Synthesis of carbon films were performed by sputtering of graphite target with argon ion beam under various plasma source power, substrate arrangement and bias voltage. Carbon films deposited were characterized by Raman spectroscopy, FT-IR and friction test. Raman spectra shows the carbon films that have different structure from conventional diamond like carbon films were synthesized by increasing plasma source power at shorter distance between a substrate and the source. Moreover, the carbon film shows no absorption band in infrared region and low friction coefficient of 0.05 between steel ball in air.

这项研究旨在开发出高纯度钻石和钻石的合成设备，例如碳膜，在大​​面积上以较高的生长速度。开发的设备由等离子体来源，电源，气体进料系统，真空系统，冷却系统和反应室组成。血浆源的连接法兰激活碳原子和离子束源以溅射石墨目标，将激光束的窗口安装在反应室壁上。钻石和钻石之类的碳膜是由通过离子束溅射或激光消融蒸发的碳原子合成的，该碳原子被等离子体喷气激活的碳原子包括最高80A的电子。碳膜的融合是通过在各种血浆源源源和BBIAS sudstrate and substrate and substrate and byias volictage和Bias soptage和Bias volicement和Biias volicement and Biias volictage和BaiiS soptage ssudtage和Bagias beam的溅射进行的。沉积的碳膜以拉曼光谱，FT-IR和摩擦测试为特征。拉曼光谱显示，通过增加基板和源之间较短距离的等离子体源功率来合成与传统钻石不同结构的碳膜。此外，碳膜在红外区域没有吸收带，在空气中钢球之间的低摩擦系数为0.05。