Fundamental Study on a Synthesis Apparatus of Transparent Diamond Films by Chemical Vapor Deposition

化学气相沉积透明金刚石薄膜合成装置的基础研究

基本信息

批准号：
06452157
负责人：
YOSHIKAWA Masanori
金额：
$ 4.61万
依托单位：
Tokyo Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (B)
财政年份：
1994
资助国家：
日本
起止时间：
1994 至 1995
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-06452157/
关键词：
Chemical vapor deposition Diamond Transparency Synthesis apparatus Arc discharge Plasma jet Magnetic field

项目摘要

Diamond films were synthesized by arc discharge plasma jet CVD that is suitable for high rate synthesis. However, this method has drawbacks such as distributions of thickness and quality occurs in diamond films. Thus, the plasma state were controled by magnetic field with a newly type of an apparatus that were designed and developed in order to study the effect of magnetic field on the shape and quality of diamond films deposited. As a result of application of magnetic field to plasma jet generated with methane, hydrogen and argon gases, the diameter of a plasma jet increases and the distributios of thickness and quality are improoved.The deposition conditions were also discussed for synthesizing transparent diamond films. Diamond films that have high transmittance are obtained at lower methane concentration of 1% independen of nucleation density. Transmittance of the diamond film that polished with diamond wheel was measured with FTIR and was approximately 68% at the wavelength of 10mum. This transparent diamond film was found to have random orientation by X-ray diffraction analysis and less defects and impurities by the observation of the structure of its cross section. As it takes long time to synthesize thick transparent diamond films under the determined deposition conditions, CVD apparatuses need to generate a stable and long-life time plasma jet.

钻石膜是由适合高速合成的电弧排放等离子体JET CVD合成的。但是，这种方法具有诸如厚度和质量分布之类的缺点，发生在钻石膜中。因此，通过磁场控制了血浆状态，其设计和开发了新型的设备，以研究磁场对沉积钻石膜的形状和质量的影响。由于将磁场应用于甲烷，氢和氩气产生的等离子体喷射，血浆射流的直径增加，厚度和质量的分布也得到了促进。还讨论了沉积条件，以合成透明的钻石膜。具有较高透射率的钻石膜是在1％独立成核密度独立的较低甲烷浓度下获得的。用FTIR测量了用钻石轮抛光的钻石膜的透射率，在10MUM的波长下约为68％。发现这种透明的钻石膜通过X射线衍射分析具有随机定向，并且通过观察其横截面结构的缺陷和杂质更少。由于在确定的沉积条件下综合厚透明的钻石膜需要很长时间，因此CVD设备需要产生稳定且长寿的等离子射流。