Development of Optical MEMS Pressure Sensor Technology for High Temperature Applications

开发适用于高温应用的光学 MEMS 压力传感器技术

• 批准号: 522088-2018
• 负责人: Nieva, Patricia
• 金额: $ 1.82万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2018
• 资助国家: 加拿大
• 起止时间: 2018-01-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=660951
• 关键词: Development; Optical; MEMS; Pressure; Sensor

Pressure sensing in plastic injection molding is critical to the quality of manufactured consumer and commercial goods and need**to be able to operate up to temperatures of 350°C and pressures up to 10,000 psi. To operate in this very harsh environment our**pressure sensors utilize a membrane to infer pressure and depending on the conditions, the membrane may be directly exposed**to the load, but in the majority of cases, pressure transfer fluids such as mercury, are often used to protect the sensor from the**high temperature of the plastic melt and to facilitate remote sensing. However, the use of pressure transfer fluids reduces the**accuracy of the sensor and mercury is restricted in Canada and many other countries.**The objective of the proposed project is to investigate the feasibility of expanding our pressure transducer production line by**offering a family of optical Micro Electro Mechanical Systems (MEMS) pressure sensors able to operate at these extreme high**temperatures with improved accuracy and without the need of pressure transfer fluids. This new sensor line will also be designed**to use our proprietary harsh environment packaging assembly, thus significantly reducing the production costs and time to marketshare.**In the longer term, outcomes of the described research collaboration will result in significant cost reduction for the**development of new commercial lines of sensors, along with the development of mercury free, higher quality and more accurate**science-based sensor products.

塑料注射成型中的压力传感对于消费品和商业产品的质量至关重要，需要**能够在高达 350°C 的温度和高达 10,000 psi 的压力下运行，才能在这种非常恶劣的环境中运行**。压力利用膜来推断压力，根据具体情况，膜可能会直接暴露**到负载，但在大多数情况下，压力传输流体（例如汞）通常用于保护传感器免受**高的然而，压力传输流体的使用降低了传感器的**精度，并且汞在加拿大和许多其他国家受到限制。**拟议项目的目的是调查通过提供一系列光学微机电系统 (MEMS) 压力传感器来扩大我们的压力传感器生产线的可行性，这些传感器能够在这些极端高温下运行，并且精度更高，并且不需要压力传输流体。线也将是设计**使用我们专有的恶劣环境包装组件，从而显着降低生产成本和上市时间。**从长远来看，所述研究合作的成果将导致**开发新商业产品的成本显着降低传感器系列，以及无汞、更高质量和更准确**基于科学的传感器产品的开发。