Coating and Development Station for High-Resolution Optical Lithography

高分辨率光学光刻镀膜和显影站

• 批准号: 517239846
• 金额: --
• 依托单位: Universität Bremen
• 依托单位国家: 德国
• 项目类别: Major Research Instrumentation
• 财政年份: 2023
• 资助国家: 德国
• 起止时间: 2022-12-31 至 无数据
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/517239846?language=en
• 关键词: Coating; Development; Station; Resolution; Optical

Flexible sensor systems based on organic semiconductors enable a wide range of novel applications, especially in the field of wearable electronics and health and life sciences. Most research, however, is focussed on the optimization of individual sensors and devices; a larger scale integration of a flexible system and the integration of microfluidic system to deliver and control analytes is only rarely addressed due to the high technological challenges. The Institute for Mikrosensors, -actuators, and -systems (IMSAS) of the University of Bremen combines knowledge in organic devices with extensive experience in the fabrication of microsystems and microfluidic elements, which provides an ideal background to move the field of flexible organic sensor systems further towards higher integration density. A highly reproducible optical lithography is essential for this research. However, the equipment currently available at IMSAS for coating and development of optically active layers provides neither the functionality nor quality required for an integration of flexible components. Essential options are missing. Although a multi-step lithography on complex surfaces is a prerequisite for the integration of organic devices, the equipment currently available at IMSAS only allows simple spin-on deposition, which results in large variations in layer thickness and device characteristics. Several deposition methods for adhesion promoters are not possible as well, and the choice of photoresists and developers is limited due to safety requirements. To fill these gaps in the fabrication technology, and to be able to perform the intended experiments, a new coating and development station is requested here that i) allows homogeneous coating and development including edge removal, ii) allows spray coating for more complex topographies, iii) allows deposition of an adhesion promoter inside a vacuum hot plate, and iv) includes two additional hot plates to perform complex temperature treatments.

基于有机半导体的柔性传感器系统可实现广泛的新颖应用，特别是在可穿戴电子产品以及健康和生命科学领域。然而，大多数研究都集中在单个传感器和设备的优化上。由于技术挑战较高，柔性系统的更大规模集成以及用于输送和控制分析物的微流体系统的集成很少得到解决。不莱梅大学微型传感器、执行器和系统研究所 (IMSAS) 将有机器件知识与微系统和微流体元件制造方面的丰富经验相结合，为推动柔性有机传感器系统领域的发展提供了理想的背景进一步迈向更高的集成密度。高度可重复的光学光刻对于这项研究至关重要。然而，IMSAS 目前用于光学活性层涂层和开发的设备既不能提供柔性组件集成所需的功能，也不能提供质量。缺少基本选项。尽管复杂表面上的多步光刻是有机器件集成的先决条件，但 IMSAS 目前提供的设备仅允许简单的旋涂沉积，这导致层厚度和器件特性存在较大变化。粘合促进剂的多种沉积方法也是不可能的，并且由于安全要求，光致抗蚀剂和显影剂的选择受到限制。为了填补制造技术中的这些空白，并能够进行预期的实验，这里需要一个新的涂层和开发站，i）允许均匀的涂层和开发，包括边缘去除，ii）允许喷涂更复杂的形貌， iii) 允许在真空热板内沉积粘合促进剂，并且 iv) 包括两个额外的热板以执行复杂的温度处理。