Limited super resolution of optical lithography by applying polarized quantum interference between electron wave-functions

通过在电子波函数之间应用偏振量子干涉来限制光学光刻的超分辨率

基本信息

批准号：
17560038
负责人：
SHIBUYA Masato
金额：
$ 2.24万
依托单位：
Tokyo Polytechnic University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2005
资助国家：
日本
起止时间：
2005 至 2006
项目状态：
已结题

项目摘要

By using polarized quantum interference between electron wave-functions, we had proposed the super resolution method. Then we attempted the fundamental experiment to verify this proposal. Although we have been researching proper materials having the property of polarized two-photon absorption, so far we found no material except for CuCl. Since the lifetime of excited state of CuCl is very short, we should measure the existence of super resolution pattern just when CuCl is illuminated by the polarized two coherent light beam. However we did not find the super resolution. One reason is that the CuCl crystal was not grown by immersing Cu-plate into CuCl-solution. Moreover we try another methods, but we did not obtain sufficient result.In order to get practical solution in industry, resist is required only to have the property of two-photon absorption but not required to have that of the polarized two-photon absorption. Then we considered and proposed the new method, in which method the super resolution can be obtained by controlling the time-dependent polarization state. As the typical example, by controlling the difference between the phase between two p-polarized beam and that between two s-polarized beam, the fundamental spatial frequency of generated pattern can be vanished. Moreover, controlling the original entrance beam in order that p-polarized light and s-polarized light do not exist simultaneously, the twice finer pattern can be obtained. Therefore this method is regarded as that controlling the higher order coherence of polarization. We experimented to confirm the feasibility of this new method. Then by controlling the wavefront of laser beam, the novel pattern was found on the two-photon absorption material.We will construct the theory of higher order coherence of polarization, propose the practical configuration for this method, and obtain the super resolution. Moreover, in order to get various type of pattern, we develop the new configuration.

利用电子波函数之间的偏振量子干涉，我们提出了超分辨方法。然后我们尝试进行基础实验来验证这个建议。尽管我们一直在研究具有偏振双光子吸收特性的合适材料，但到目前为止，除了CuCl之外，我们还没有发现任何材料。由于CuCl激发态的寿命很短，因此我们应该在CuCl被偏振两相干光束照射时测量超分辨图案的存在。但是我们没有找到超分辨率。原因之一是 CuCl 晶体不是通过将 Cu 板浸入 CuCl 溶液中来生长的。此外，我们还尝试了另一种方法，但没有得到足够的结果。为了在工业上得到实用的解决方案，光刻胶只需要具有双光子吸收特性，而不需要具有偏振双光子吸收特性。然后我们考虑并提出了新的方法，该方法可以通过控制与时间相关的偏振态来获得超分辨率。作为典型的例子，通过控制两个p偏振光束和两个s偏振光束之间的相位差，可以消除所生成图案的基本空间频率。此外，控制原始入射光束以使p偏振光和s偏振光不同时存在，可以获得两倍精细的图案。因此该方法被认为是控制偏振高阶相干性的方法。我们通过实验验证了这种新方法的可行性。然后通过控制激光束的波前，在双光子吸收材料上发现了新的图案。我们将构建偏振高阶相干理论，提出该方法的实用配置，并获得超分辨率。此外，为了获得各种类型的图案，我们开发了新的配置。

项目成果

期刊论文数量（28）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

High repetition rate Q-switching performance in transversely diode-pumped Nd doped mixed gadolinium yttrium vanadate bounce laser

DOI：
10.1364/oe.14.002727
发表时间：
2006-04
期刊：
2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference
影响因子：
0
作者：
T. Omatsu;A. Minassian;M. Damzen
通讯作者：
T. Omatsu;A. Minassian;M. Damzen

Power scaling of highly neodymium-doped YAG ceramic lasers with a bounce amplifier geometry

具有反射放大器几何形状的高掺钕 YAG 陶瓷激光器的功率缩放