A study of a method to improve the productivity of mixed semiconductor manufacturing

提高混合半导体制造生产率方法的研究

基本信息

批准号：
15560350
负责人：
SAITO Kazuyuki
金额：
$ 1.09万
依托单位：
University of Aizu
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2004
项目状态：
已结题

项目摘要

I performed this project from fo11owing two view points; a research on a dispatching algorithm, and a research on a development of a manufacturing simulator.A new dispatching algorithm for dynamic allocation of Work-In-Process (WIP) named Pseudo Periodical Priority Dispatching (P3D) is proposed. Performance parameters, adjustment rate, throughput, response time and tardiness, when applying P3D are studied and compared with the results of FCFS and SPT by simulations assuming a Poisson arrival. The adjustment rate is the minimum is P3D. P3D is effective both in the bottleneck modeled processing step and in the non-bottleneck modeled processing step. Especially in the bottleneck modeled processing step, although the average response time of SPT is minimum, that for P3D is about 65% of that for FCFS and the tardiness for P3D is about 28% of that for SPT. Then P3D is confirmed that the fair dispatching is achieved. Finally the author concluded that P3D is an effective dispatching algorithm in the case of the broad product-mix.The manufacturing simulator is developed based on a color Petri Net theory. The semiconductor manufacturing system can be described by a loop-type net, although the system has more than 300 processing steps. However, new mechanisms are required for describing the semiconductor manufacturing system. A new attributes shall be defined for the tokens corresponding to the processing step, and attribute for the transition shall be defined by referring the sequence table for the LSI fabrication. Also I have proposed some new component for the Petri Net to describe the system easily.The evaluation in the actual semiconductor facilities will be the future subject of this research.

我从以下两个角度进行了这个项目：提出了一种新的动态分配在制品(WIP)的调度算法——伪周期优先调度(P3D)。研究了应用 P3D 时的性能参数、调整率、吞吐量、响应时间和延迟，并通过假设泊松到达的模拟与 FCFS 和 SPT 的结果进行比较。调整率最小的是P3D。 P3D 在瓶颈建模处理步骤和非瓶颈建模处理步骤中均有效。特别是在瓶颈建模处理步骤中，虽然SPT的平均响应时间最小，但P3D的平均响应时间约为FCFS的65％，P3D的延迟约为SPT的28％。然后P3D确认实现了公平调度。最后作者得出结论：在广泛的产品组合情况下，P3D是一种有效的调度算法。制造模拟器是基于彩色Petri网理论开发的。半导体制造系统可以用环形网络来描述，尽管该系统有300多个处理步骤。然而，需要新的机制来描述半导体制造系统。应当为与处理步骤相对应的令牌定义新的属性，并且应当通过参考LSI制造的顺序表来定义转换的属性。我还为Petri网提出了一些新的组件来轻松描述系统。实际半导体设施中的评估将是本研究的未来主题。