Development of an aspherical shape measurement system for on-machine

机上非球面形状测量系统的开发

• 批准号: 15560099
• 负责人: NOMURA Takashi
• 金额: $ 1.92万
• 依托单位: Toyama Prefectural University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2003
• 资助国家: 日本
• 起止时间: 2003 至 2005
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15560099/
• 关键词: Aspherical; Shape measurement; On-machine; Shearing interferometer; Zone plate

To measure an aspherical surface processed by an ultra precision lath, an on-machine measurement system was developed as follows:1)Shearing interferometer : A shearing interferometer was developed to measure the asperical surface on the ultra precision lath just after the processing. Because a part of an interferogram was covered with a tool post, the intensity of the interferogram acquired by a line CCD camera was analyzed. And a zone plate was used to generate the aspherical wave front.2)Software : Software was developed to analyze the interferograms. The interferograms were obtained every time that the measured surface was turned fixed angle. Therefore, each interferogram was analyzed to obtained a line shape passing through the turning center and the line shapes were assembled to construct aspherical surface. And an algorism was developed to fit a curve into measured shape.3)Experiment and results : A spherical mirror with shape error in center point was measured to estimate an ability of developed system. The result obtained by developed system agree well with the result obtained by Fizeau interferometer.4)Proposal of new principle : A method of measurement using many sphere wave fronts with various curvatures was proposed to measure these aspherical surfaces. Validity of proposed method was confirmed by simulations and experiments.

为了测量通过超精度板条处理的非球面表面，开发了一个机上测量系统，如下所示：1）剪切干涉仪：开发了剪切干涉仪以测量处理后超精度板上的透明表面。由于干涉图的一部分被工具柱覆盖，因此分析了线CCD摄像头获得的干涉图的强度。并使用区域板来生成非球波前部。2）软件：软件是为分析干涉图的软件。每次将测得的表面固定角度转角时，都会获得干涉图。因此，分析了每个干涉图以获得穿过转弯中心的线形状，并组装了线形以构建非球面。 3）实验和结果：测量了中心点形状误差的球形镜，以估算开发系统的能力。通过开发系统获得的结果与Fizeau干涉仪获得的结果非常吻合。4）提出了新原理的建议：一种使用许多带有各种曲率的球形前沿进行测量的方法来测量这些非球面。通过模拟和实验证实了建议的方法的有效性。

项目成果

有限長データ用ローパスフィルタの研究(第2報)

有限长度数据低通滤波器的研究（第二次报告）

• 发表时间: 2006
• 期刊: 精密工学会誌 72・5
• 作者: 沼田宗敏;野村俊;神谷和秀;田代発造;輿水大和
• 通讯作者: 輿水大和

Hiroyasu Koshimizu, Filter with variable transmission characteristics for determination of three-dimensional roughbness

Hiroyasu Koshimizu，具有可变传输特性的滤波器，用于测定三维粗糙度

• 发表时间: 2006
• 期刊: Precision Engineering Vol.30
• 作者: Munetoshi Numada;Takashi Nomura;Kazuhide Kamiya;Hatsuzo Tashiro
• 通讯作者: Hatsuzo Tashiro

うねり曲線を抽出するローパスフィルタの研究

波纹度曲线提取低通滤波器的研究

• 发表时间: 2005
• 期刊: 精密工学会誌 71・2
• 作者: 沼田宗敏;野村俊;神谷和秀;田代発造;輿水大和
• 通讯作者: 輿水大和

A Study on Low-Pass Filter for Finite Length Data (2^<nd> Report)

有限长度数据低通滤波器的研究（2^<nd>报告）

• 发表时间: 2006
• 期刊: Journal of the Japan Society for Precision Engineering Vol.71
• 作者: Munetoshi Numada;Takashi Nomura;Kazuhide Kamiya;Hatsuzo Tashiro;Hiroyasu Koshimizu
• 通讯作者: Hiroyasu Koshimizu

A Study on Low-Pass Filter for Extracting Waviness Profile (3^<rd> Report)

用于提取波纹度轮廓的低通滤波器的研究（第3^<rd>报告）

• 发表时间: 2005
• 期刊: Journal of the Japan Society for Precision Engineering Vol.71
• 作者: Munetoshi Numada;Takashi Nomura;Kazuhide Kamiya;Hatsuzo Tashiro;Hiroyasu Koshimizu
• 通讯作者: Hiroyasu Koshimizu