Smart Nano-Machining and Measurement System with Diamond Probe Array Integrated with Piezoelectric Sensors and Actuators

智能纳米加工和测量系统，配备集成了压电传感器和执行器的金刚石探针阵列

• 批准号: 13555068
• 负责人: SHIBATA Takayuki
• 金额: $ 8.38万
• 依托单位: IBARAKI UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13555068/
• 关键词: Smart nano-machining and measurement system; Nanolithography; Atomic force microscope; AFM probes; Diamond thin films; Piezoelectric thin films; Actuators; Sensors; 次世代ナノ加工・計測システム; ナノリソグラフィー

We have developed a smart nano-machining and measurement system with a diamond probe array integrated with piezoelectric sensors and actuators. In order to realize this system, first, we have studied on a variety of micromachining techniques of diamond thin films. Then, we have developed a batch fabrication process for diamond AFM probes. The diamond probes were fabricated by selective deposition for patterning a diamond cantilever and a Si mold technique for producing a sharp diamond tip together with the anodic bonding technique of a glass backing plate to a diamond base, to which the diamond probes have been attached, to facilitate handling. The fabricated diamond probes were optimally designed for contact mode AFM measurements by FEA simulations, and consisted of two kinds of V-shaped cantilever with spring constants of approximately 1 N/m and 5 N/m. These diamond probes proved capable of measuring AFM images.In addition, we fabricated lead zirconate titanate (PZT) thin film on a d … More iamond thin film substrate and examined its piezoelectric properties. We applied the rapid thermal annealing in a N_2 ambient for PZT thin film sputtered at room temperature on a diamond thin film substrate. Under conditions of a temperature ramp rate of 10℃/s and an annealing temperature of 700℃, deposited PZT thin film showed a phase transformation to a perovskite structure. However, piezoelectric constant d_<31> was potentially low, about -20 pC/N, due to rough surface of the diamond thin film. Poling was proved to be an effective process to improve a piezoelectric constant, that being about -65 pC/N. In order to fabricate the structure of a piezoelectric sensor and actuator on a diamond cantilever, PZT thin film was also successfully patterned by RIE in SF_6 plasma using a Pt mask layer to be used as an upper electrode without damaging the diamond cantilever layer. Using our developed fabrication and patterning techniques of PZT thin film, we realized a diamond AFM probe with a PZT sensor and actuator. A sensing resolution of 0.4 nm and an actuation force of 12 μN at an applied voltage of 8 V were obtained. Less

我们已经开发了一个智能的纳米辅助和测量系统，该系统具有与压电传感器和执行器集成的钻石探针阵列。为了实现这一系统，首先，我们研究了各种微加工钻石薄膜的微加工技术。然后，我们开发了用于钻石AFM探针的批处理工艺。通过选择性沉积来制造钻石探针，用于对钻石悬臂进行构图和SI模具技术，用于生产锋利的钻石尖端，以及玻璃底板的阳极粘合技术到钻石底座上，并将钻石探针连接到钻石底座上，以便利处理。制造的钻石探针是通过FEA模拟最佳设计用于接触模式AFM测量的，由两种V形悬臂组成，弹簧常数约为1 N/M和5 N/M。这些钻石问题提供了能够测量AFM图像的问题。此外，我们在D…更多的iamond薄膜底物上制造了锆酸钛酸铅（PZT）薄膜，并检查了其压电特性。我们在N_2环境中应用了快速的热退火，以在钻石薄膜基板上在室温下溅射的PZT薄膜。在温度坡道速率为10℃/s的条件下，沉积的PZT薄膜的退火温度为700℃，显示了对钙钛矿结构的相变。然而，由于钻石薄膜的粗糙表面，压电电常数d_ <31>可能低约为-20 pc/n。事实证明，poling是改善压电常数的有效过程，约为-65 pc/n。为了在钻石悬臂上制造压电传感器和执行器的结构，使用PT掩码层在SF_6等离子体中成功地对PZT薄膜进行了图案，并在没有损坏钻石悬臂层的情况下将其用作上电极。使用我们开发的PZT薄膜制造和图案技术，我们意识到了带有PZT传感器和执行器的钻石AFM探针。获得了0.4 nm的感应分辨率和在8 V的施加电压下的致动力。较少的

项目成果

K.Unno: "Smart Nano-Machining and Measurement System with Semiconductive Diamond Probe"Smart Materials and Structures. 10・4. 730-735 (2001)

K.Unno：“使用半导体金刚石探针的智能纳米加工和测量系统”智能材料和结构10・4（2001）。

T.Shibata, K.Unno, E.Makino, Y.Ito, S.Shimada: "Characterization of Sputtered ZnO Thin Film as Sensor and Actuator for Diamond AFM Probe"Sensors and Actuators. A102(1-2). 106-113 (2002)

T.Shibata、K.Unno、E.Makino、Y.Ito、S.Shimada：“溅射 ZnO 薄膜作为金刚石 AFM 探针传感器和执行器的表征”传感器和执行器。

柴田隆行, 牧野英司: "ダイヤモンドMEMS"砥粒加工学会誌. 46(6). 286-289 (2002)

Takayuki Shibata，Eiji Makino：“金刚石 MEMS”磨料加工学会杂志 46(6) (2002)。

T.Shibata, E.Makino: "Diamond-based Microelectro-mechanical Systems (MEMS)(in Japanese)"J Jpn. Soc. Abrasive Technol.. 46,6. 286-289 (2002)

T.Shibata、E.Makino：“基于金刚石的微机电系统 (MEMS)（日语）”J Jpn。

K.Unno, Y.Kitamoto, T.Shibata, E.Makino: "Smart Nano-Machining and Measurement System with Semiconductive Diamond Probe"Smart Materials and Structures. 10(4). 730-735 (2001)

K.Unno、Y.Kitamoto、T.Shibata、E.Makino：“采用半导体金刚石探针的智能纳米加工和测量系统”智能材料和结构。