Smart Nano-Machining and Measurement System with Diamond Probe Array Integrated with Piezoelectric Sensors and Actuators

智能纳米加工和测量系统，配备集成了压电传感器和执行器的金刚石探针阵列

• 批准号: 10555075
• 负责人: SHIBATA Takayuki
• 金额: $ 7.55万
• 依托单位: HOKKAIDO UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10555075/
• 关键词: Smart nano-machining and measurement system; Nanolithograph; Atomic force microscope; AFM robes; Diamond thin films; Piezoelectric thin films; Actuators; Sensors; ナノ計測一体型超微細加工システム; ナノリングラフィー

We have been developing a smart nano-machining and measurement system with a diamond probe array integrated with piezoelectric sensors and actuators.In order to realize this system, first, we have developed a variety of micromachining techniques of diamond thin films. These include the patterning of diamond thin films, sacrificial layer etching for the fabrication of movable microstructures being released from a substrate, a mold technique for the fabrication of three-dimensional microstructures, and bonding for assembly and packaging.Next, using a semiconductive diamond tip fabricated by the mold technique, we have developed an ultraprecision machining system with an in situ STM function. The results obtained showed that this newly developed semiconductive diamond tip was effective both as a machining tool and an STM tip.Then, we have developed a batch fabrication process for diamond AFM probes. This process includes our newly developed technique for the anodic bonding of a glass back … More ing plate to a diamond base, to which diamond probes have been attached, to facilitate handling. The diamond probes having been fabricated selective deposition for patterning a diamond cantilever and a Si mold technique for producing a sharp diamond tip. The fabricated diamond probes were optimally designed for contact mode AFM measurements by FEA simulations, and consisted of two kinds of V-shaped cantilever with spring constants of approximately 1 N/m and 5 N/m. These diamond probes proved capable of measuring AFM images.Finally, in order to realize the piezoelectric sensors and actuators, we have studied the optimum sputtering conditions of piezoelectric thin films such as ZnO and PZT, giving the piezoelectric constants d31 of around 3 and 90 pC/N, respectively. The values were measured using our newly developed measurement method for the piezoelectric constant d31 of thin film, based on the free vibration theory of cantilever beams. We have also developed the patterning techniques of the piezoelectric thin films. Less

我们一直在开发一种智能纳米加工和测量系统，该系统具有集成了压电传感器和执行器的金刚石探针阵列。为了实现该系统，我们首先开发了多种金刚石薄膜的微加工技术，其中包括图案化。金刚石薄膜的制备、用于制造从基板上释放的可移动微结构的牺牲层蚀刻、用于制造三维微结构的模具技术以及用于组装和封装的粘合。接下来，使用通过模具技术制造的半导体金刚石尖端，我们开发了一种具有原位STM功能的超精密加工系统，获得的结果表明，这种新开发的半导体金刚石尖端作为加工工具和STM尖端都是有效的。开发了一种用于金刚石 AFM 探针的批量制造工艺，该工艺包括我们新开发的技术，用于将玻璃背板阳极粘合到金刚石底座上，金刚石底座已固定在金刚石底座上，以方便安装。金刚石探针采用选择性沉积技术制造，用于形成金刚石悬臂图案，并采用硅模具技术生产锋利的金刚石尖端。所制造的金刚石探针经过有限元分析 (FEA) 模拟，针对接触模式 AFM 测量进行了优化设计，并由两种 V 型探针组成。弹簧常数约为1 N/m和5 N/m的形状悬臂梁被证明能够测量AFM图像。最后，为了实现压电传感器和执行器，我们研究了压电传感器和执行器。 ZnO和PZT等压电薄膜的最佳溅射条件，压电常数d31分别约为3和90 pC/N。这些值是使用我们新开发的薄膜压电常数d31测量方法测量的。基于悬臂梁的自由振动理论，我们还开发了压电薄膜的图案化技术。

项目成果

柴田隆行: "ダイヤモンド薄膜のマイクロマシニング"表面技術. 50・11. 961-967 (1999)

Takayuki Shibata：“金刚石薄膜的微机械加工”50・11（1999）。

T. Shibata: "Micromachining of Diamond Thin Films (in Japanese)"J. Surface Finishing Soc. Japan. 50,11. 961-967 (1999)

T. Shibata：“金刚石薄膜的微加工（日语）”J。