Equipment: MRI: Track 1 Acquisition of a 3-Dimensional Nanolithography Instrument

设备：MRI：轨道 1 获取 3 维纳米光刻仪器

• 批准号: 2320636
• 负责人: Kai Liu
• 金额: $ 54.98万
• 依托单位: Georgetown University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2023
• 资助国家: 美国
• 起止时间: 2023-09-01 至 2026-08-31
• 项目状态: 未结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2320636&HistoricalAwards=false
• 关键词: Equipment; MRI; Track; Acquisition; Dimensional

This award supports the acquisition of a state-of-the-art 3-dimensional (3D) nanolithography instrument that uses a two-photon polymerization process to achieve 3D miniature structures. The instrument meets a critical need for creating 3D micro/nanostructures, particularly for a wide variety of functional inorganic and organic nanostructures, on the Georgetown University campus and in the greater District of Columbia area. The research projects enabled by this instrument have potentially major technological impacts in ultralow power information storage, nanoelectronics, filtration media, biomimetics, artificial retina repair, nanophononics, high performance materials, and mechanical metamaterials. The instrument also supports activities in broadening participation of underrepresented groups in STEM fields from a broad user base at Georgetown and nearby institutions, and educational and outreach activities to provide students with hands-on learning experiences and to provide research experience for undergraduate students through REU programs.The 3D nanolithography instrument has unique technical features that are critical to support many NSF-funded projects as well as future research efforts, including the 3D patterning capability with deep submicron feature sizes down to 160 nm, large writing areas of 100 mm across, versatile writing modes for arbitrary 3D trajectories as well as for ultra-fast structuring in a layer-by-layer process, integration with 2D nanolithography, and flexibility in customer-design of polymers. These features are ideal for meeting the broad demands and wide length scales involved in studying a large variety of technologically important micro/nanomaterials. The instrument enables broad range of ground-breaking materials research projects , including 3D topological spin textures for energy-efficient information storage, magnetic networks for 3D memory and neuromorphics, metal foams for efficient and robust filtration media, complex networks for realizing high performance metamaterials and structural materials, biomimetics for achieving new classes of engineered and stimuli-responsive materials, biomedical scaffolds for retinal cell replacement therapy, microfluidic platforms for organ-on-a-chip explorations, and nanophononics to advance 3D nanofabrication using 3-photon polymerization. This shared 3D nanolithography instrument will be transformative for the research infrastructure at Georgetown University and the greater DC area. There is a large and growing multi-disciplinary General User base from the surrounding area, including 2 HBCUs and 6 other institutes from academia, national lab, and industry. Women represent a large fraction of junior researchers from the anticipated user. The instrument will be integrated with graduate and undergraduate curriculum to provide students with hands-on learning experiences. It will also be utilized to provide research experience for undergraduate students through REU programs.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

该奖项支持获得最先进的3维（3D）纳米光刻工具，该工具使用两光子聚合过程来实现3D微型结构。该乐器满足了创建3D微/纳米结构的关键需求，特别是在乔治敦大学校园和大哥伦比亚地区的各种功能性无机和有机纳米结构中。该仪器启用的研究项目可能对超大电力信息存储，纳米电子学，过滤媒体，仿生材料，人工视网膜维修，纳米光音，高性能材料和机械超材料产生潜在的主要技术影响。该工具还支持从乔治敦和附近机构的广泛用户群中扩大代表性不足的团体参与的活动，以及教育和外展活动，以为学生提供动手学习的学习经验，并通过REU计划为学生提供研究经验3d纳米印刷工具具有独特的技术功能，对于支持许多NSF资助的项目以及未来的研究工作至关重要为任意3D轨迹以及在逐层过程中的超快速结构的编写模式，与2D纳米光刻的集成以及聚合物客户设计中的灵活性。这些特征是满足广泛的需求和宽长尺度的理想选择。该仪器可实现广泛的开创性材料研究项目，包括用于节能信息存储的3D拓扑旋转纹理，用于3D记忆和神经形态的磁网络，用于高效且稳健的过滤媒体的金属泡沫，用于实现高性能的元材料的复杂网络结构材料，用于实现新的工程和刺激响应材料的新类别的生物模型，用于视网膜细胞替代疗法的生物医学支架，用于芯片探索器官探索的微流体平台以及使用3-Photon Polymerization促进3D纳米制造的纳米式探索。该共享的3D纳米光刻工具将对乔治敦大学和大型DC地区的研究基础设施进行变革。周围地区有一个庞大的多学科一般用户群，其中包括2个HBCU和来自学术界，国家实验室和工业的6个其他机构。女性代表了预期用户的大量初级研究人员。该乐器将与研究生和本科课程集成，为学生提供动手学习经验。它还将通过REU计划为本科生提供研究经验。该奖项反映了NSF的法定任务，并使用基金会的知识分子优点和更广泛的影响审查标准，被视为值得通过评估来提供支持。