Creation of Ultraprecision Micro Parts with High Aspect Ratio and Complex Shape and its Application

高长径比复杂形状超精密微型零件的制作及其应用

基本信息

批准号：
13555033
负责人：
TAKEUCHI Yoshimi
金额：
$ 7.49万
依托单位：
Osaka University (2002)The University of Electro-Communications (2001)
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2001
资助国家：
日本
起止时间：
2001 至 2002
项目状态：
已结题

项目摘要

The study deals with the creation method of ultraprecision micro parts with high aspect ratio and complex shape, i.e. tall, small and complex shape, by making use of a multi-axis control ultraprecision machining center. The shape with high aspect ratio is usually difficult to create. The possibility of creating such a shape may lead to the application to new fields. In the previous year, the fundamental shape creation technology such as micro trapezoid groove, cylinder and prismatic parts of 1 mm in length with aspect ratio of 40, etc. was established by use of various kinds of diamond tools. This year, the following shapes were created; (1) micro pin array consisting of several cylinders and prismatic parts with high aspect ratio, (2) mirror segments array as an optical system for the next generation stepper and (3) micro Buddha head with complex shape. With regard to each item, the study is summarized as follows:(1) Micro pin array with 9 needles could be machined with a rotational diamond tool, based on the tool path generated by the way of not making contact any more with already machined portions. The metal molding technology is required to produce such a shape since it takes much time to create it. Thus, the electro plating was tried for molding, however the uniform electro plating was difficult to achieve.(2) Mirror segments array, whose surface roughness is 1 nm, consists of a series of 1mm* 15mm segment being cut from different positions of the sphere of 660 mm in radius. With 5-axis control machining, the segments of about 660mm in radius were machined, however the surface roughness was 10 nm. Farther improvement is required.(3) Based on the shape data of Buddha bead, 5-axis control machining of Buddha head of about 3 mm in diameter was carried out, taking account of tool collision. The shape was successfully completed, however has overcut parts on the surface due to the difficulty of tool setting.

该研究通过利用多轴控制超重新计算机加工中心，涉及具有高纵横比和复杂形状的超压缩微型零件的创建方法，即高，小且复杂的形状。通常很难创建具有高纵横比的形状。创建这种形状的可能性可能会导致应用到新字段。在上一年，通过使用各种钻石工具，建立了基本形状的创造技术，例如微梯形凹槽，圆柱体和棱镜部分，长宽比等40毫米等。今年，创建了以下形状；（1）由具有高纵横比的几个圆柱体和棱镜部分组成的微销阵列，（2）镜面段阵列作为下一代步进的光学系统，以及（3）具有复杂形状的微佛特头。关于每个项目，研究总结如下：（1）基于旋转钻石工具的微销阵列，该阵列可以通过旋转钻石工具加工，这是基于通过不再与已经机械加工的部分进行接触而产生的工具路径。由于需要花费大量时间来创建它，因此需要金属成型技术来产生这种形状。因此，尝试进行电镀进行模制，但是很难实现均匀的电镀。（2）镜面段阵列（其表面粗糙度为1 nm）由一系列的1mm* 15mm段组成，从半径为660 mm的球体的不同位置切割。使用5轴控制加工，将大约660mm半径的段加工，但是表面粗糙度为10 nm。（3）基于佛陀珠的形状数据，实现了直径约3毫米的佛陀头的5轴控制加工，考虑到工具碰撞。该形状已成功完成，但是由于工具设置的难度，表面上有过度的零件。