Direct Bonding of Small Parts by Means of Ultraprecision Microgrooving Technology

利用超精密微槽技术直接粘合小零件

基本信息

批准号：
11555042
负责人：
TAKEUCHI Yoshimi
金额：
$ 6.4万
依托单位：
The University of Electro-Communications
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B).
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2000
项目状态：
已结题

项目摘要

The study proposes a new method of bonding two small parts without the use of any adhesive by making use of ultraprecision V-shaped microgrooves on the surfaces of each part. These V-shaped microgrooves allow small parts to be bonded together with high positioning accuracy due to a wedge effect and an adhesion phenomenon between the mating surfaces. Ultraprecision V-shaped microgrooves are created by using an ultraprecision machining center having 1 nm positioning resolution and a diamond milling cutter. The study is summarized as follows :1. It is found that the bonding strength in general increases with decreasing wedge angle. The effect of the wedge length on bonding strength though varies with the wedge angle where the strength increases with increasing length for wedge angles greater than 8 degrees but increases with decreasing length for wedge angles less than 8 degrees.2. These V-shaped microgrooves, whose depth and angle are 20 μm and 13.5 degree respectively, allow small parts to be tightly bonded together with high positioning accuracy due to a wedge effect and an adhesion phenomenon between two mating surfaces.3. Small parts of 4 mm * 4 mm * 4 mm that have V-shaped microgrooves in two direction could be tightly bonded with 0.380 μm positioning accuracy.4. The new method has a possibility to bond different materials each other. Two small parts with V-shaped microgrooves that are made of oxygen-free copper and aluminum are subjected to bonding test. As a result, the proposed bonding method is found to be effective to connect small parts accurately.5. It is experimentally found that the microgrooving technology is also applicable to manufacture various Fresnel lenses and optical elements.

该研究提出了一种新的方法，可以通过在每个部分的表面上使用超压缩V形的微型根部，而无需使用任何粘合剂。这些V形的微型根部可以使小零件以楔形效果和交配表面之间的粘合剂现象的高定位精度粘合在一起。通过使用具有1 nm定位分辨率和钻石磨刀器的超压缩加工中心，可以创建超重新计算V形的微型摩r根。该研究总结如下：1。发现总体上，粘结强度随楔形角的降低而增加。楔形长度对粘结强度的影响，尽管各种楔形角度，楔形角度的强度随长度大于8度而增加，但随着楔形角度小于8度的长度而增加。2。这些V形的微型植物的深度和角度分别为20μm和13.5度，因此由于楔形效应和两个交配表面之间的粘合剂现象，将小零件与高定位精度紧密地粘合在一起。3。 4毫米 * 4 mm * 4 mm的小部分在两个方向上具有V形微型根部，可以用0.380μm定位精度紧密粘合。4。新方法有可能相互键入不同的材料。由无氧铜和铝制成V形的两个小零件进行粘结测试。结果，提出的键合方法可有效地准确连接小零件5。经过实验发现，微瘤技术也适用于生产各种菲涅耳透镜和光学元素。