Development of testing system for evaluating the mechanical properties of thin microelement

薄型微元件力学性能评价测试系统的研制

基本信息

批准号：
13555025
负责人：
KOMAI Kenjiro
金额：
$ 8.83万
依托单位：
KYOTO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2001
资助国家：
日本
起止时间：
2001 至 2002
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13555025/
关键词：
Micro material Thin film Mechanical properties Tensile test Strain measurement Poly-Si thin film Fatigue Elastic modulus 疲労試験

项目摘要

In order to develop a reliable micro machine and MEMS in a service operation, much care must be taken into micro mechanical evaluation, i.e., mechanical properties of μm-sized microelements including fatigue behavior. However, the evaluation method has not been well established yet. In this study, the testing system of a thin microelement has been developed to evaluate the mechanical properties; the tensile strength, elastic modulus, fatigue strength and so on, and the evaluation methods for thin microelement are established. The system consists of a micromechanical tensile testing machine actuated by a PZT driven positioning stage, a micro manipulation system, a non-contact strain measurement system with a help of a double field of view microscope. The system is basically designed for poly-Si thin microelement with 3.5μm thick and 10μm wide. When conducting the uni-axial tensile test, the most important and difficult thing is to establish the method of gripping the specimen. In this study, a gripping method with glue is developed and successfully applied to the uni-axial tensile test without any slipping at the grip. Moreover the testing system is installed on an AFM stage and in situ observation of specimen surface is successfully done. The testing machine and a control program are improved to conduct the fatigue tests of thin microelement not only in laboratory air but also in water.

为了在服务操作中开发可靠的微型机器和MEMS，必须在微型机械评估中要注意很多小心，即μM大小的微元素（包括疲劳行为）的机械性能。但是，评估方法尚未确定。在这项研究中，已经开发了微元素的测试系统来评估机械性能。建立了拉伸强度，弹性模量，疲劳强度等，以及薄微元素的评估方法。该系统由通过PZT驱动器定位阶段激活的微机械拉伸测试机组成，微型驱动系统，一个无接触式应变测量系统，借助双视场显微镜。该系统基本上是针对厚3.5μm和10μm宽的多si薄微元素设计的。在进行单轴拉伸测试时，最重要和困难的事情是建立握住样品的方法。在这项研究中，开发了一种用胶水的抓地力方法，并成功地应用于单轴拉伸试验，而无需在握把上滑动。此外，测试系统安装在AFM阶段，原位观察样品表面已成功完成。改进了测试机和控制程序，不仅在实验室空气中而且在水中还进行了微元素的疲劳测试。