3-dimensional measurements by infrared phase-shifting digital holography

通过红外相移数字全息术进行 3 维测量

基本信息

批准号：
13555016
负责人：
KATO Jun-ichi
金额：
$ 1.09万
依托单位：
RIKEN(The institute of physical and chemical research)
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2001
资助国家：
日本
起止时间：
2001 至 2002
项目状态：
已结题

项目摘要

The purpose of this research is to develop a new technique that enables to form good 3-dimensional image in the infrared region where performances of imaging components are not so good as in the visible region and to realize interferometry and microscopy that make use of phase reconstruction. We first demonstrated reconstruction of colored images by using a 3-wavelength laser (He-Cd laser, 636 nm,537 nm, and 441 nm). The amount of phase shift was correct at the central wavelength but contains errors at the other wavelengths. We conducted computer simulation for evaluating the effect that proved not to be serious. We also compared two algorithms of reconstruction and clarified the conditions for choice. The phase shifting error could be removed by an achromatic phase shifter to provide better images.In infrared region we employed a laser of wavelength 830 nm and output power of 30 mW to reconstruct a point, diffusely reflecting objects, and phase objects. By means of phase reconstruction we could analyze surface shape of mirrors and liquid surfaces quantitatively. For diffusely reflecting surfaces, we took the difference of the reconstructed phases before and after tilt of the object illumination or object deformation to measure surface shape and displacement with resolutions of 10 micrometers and 10 nm, respectively. We also could extend the object size by employing an imaging setup.In conclusion, we can reconstruct satisfactory 3-dimensional images by using the phase-shifting digital holography in the infrared region and will be able to attain 3-dimensional measurements on Silicon crystals and biological objects which are opaque in the visible region.

这项研究的目的是开发一种新技术，该技术能够在红外区域形成良好的三维图像，在红外区域，成像组件的性能不如可见区域，并实现使用相重建的干涉法和显微镜。我们首先使用3波长激光（HE-CD激光，636 nm，537 nm和441 nm）进行了彩色图像的重建。相移的量在中心波长处正确，但在其他波长处包含误差。我们进行了计算机模拟，以评估事实证明并不严重的效果。我们还比较了两种重建算法，并阐明了选择条件。相位转移误差可以通过出色的相位变速杆来消除，以提供更好的图像。在红外区域，我们采用了波长830 nm的激光器和30 mW的输出功率来重建一个点，分散反射对象和相位对象。通过相重建，我们可以定量分析镜子和液体表面的表面形状。对于散布反射表面，我们在物体照明或物体变形之前和之后进行了重建的相位的差异，以分别用10微米和10 nm的分辨率测量表面形状和位移。我们还可以通过使用成像设置来扩展对象大小。总而言，我们可以通过使用红外区域的相位变化数字全息来重建令人满意的3维图像，并能够在可见区域中对硅晶体和生物学对象进行3维测量。