Development of Nano-mechatronics for ultra-high density data storage devices

超高密度数据存储设备纳米机电一体化的发展

基本信息

批准号：
12450105
负责人：
TAGAWA Norio
金额：
$ 8.38万
依托单位：
Kansai University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2002
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-12450105/
关键词：
ultra-high density data storage micromachine nano-mechatronics multi-layered composite PZT thin film active sliders ICP-RIE deep etching nano-tribology ultra-thin liquid lubricant films 近接記録機構マイクロトラッキング機構高アスペクト比ディープエッチング ICP-RIE法 /

项目摘要

In order to achieve more than 100 Gb/in^2 area recording density, the important fundamental technologies, which are evolutionary and necessary to develop novel head positioning actuator mechanisms based on nano-mechatronics have been studied for 3 years and completed successfully. The obtained research results are summarized as follows ;(1)Novel MEMS-based head positioning actuator mechanisms, which operate in not only lateral but also vertical directions independently at nm accuracy, were designed from the static and dynamic characteristics points of view, using FEM. The features are that the dimensions for the proposed mechanism is about 200μm×80μm and actuated by PZT thin films in two directions.(2)The important fundamental technologies are developed in order to achieve the novel head positioning actuator mechanisms. Those are total micro-machining process technologies and improved deep etching technologies to fabricate high aspect-ratio structures. We also develop the novel multi-l … More ayered composite PZT thin films, which is confirmed to have the very good piezoelectric properties.(3)MEMS-based active sliders with microactuators are proposed. The active sliders that we proposed use PZT thin films as a micro-actuator and control the slider flying height of less than 10 nm. This design concept is quite different from that for conventional passive air bearing technology, The micro-machining process for the active slider is also developed. We can confirm the feasibility of realizing the novel active pacing control technology.(4)The effects of ultra-thin liquid lubricant films on slider dynamics has been studied experimentally, in order to investigate the feasibility of realizing less than 10 nm head/disk interface (HDI). It was found that the periodic lubricant non-uniform redistribution caused by the slider-lubricant interactions was occurred and we studied the HDI design instructions from nano-technology point of view.(5)Spreading characteristics of novel cyclotriphosphazene-terminated pertluoropolyether films on carbon surfaces were investigated by using a scanning micro-ellipsometer. It was found that the mobility of novel lubricant is lower than that of conventional Zdol and the end groups affect the monolayer film thickness and the existing conformation of novel lubricant films on carbon surfaces cuold be estimated. Less

为了实现超过100 GB/In^2区域记录密度，已经研究了3年的重要基本技术，这些技术是进化的，并且是基于纳米机械学的新型头部定位执行器机制所必需的，并成功完成了研究结果总结如下，以NM精度独立设计，使用fem的静态和动态特征的观点。为了实现新型的动力学机制，开发了二型精神技术。与10 nm相比，带有微型的属性。为了研究少于10 nm的头/磁盘界面（HDI）的盛宴，我们已经研究了动力学。碳表面上的环状脂胶膜在碳表面上的现有构型估计