Xenonbasiertes Focused Ion Beam Rasterelektronen-Mikroskop (FIB-REM) mit integrierter RAMAN-Spektroskopie

具有集成拉曼光谱功能的氙基聚焦离子束扫描电子显微镜 (FIB-SEM)

• 批准号: 442921285
• 金额: --
• 依托单位: Friedrich-Alexander-Universität Erlangen-Nürnberg
• 依托单位国家: 德国
• 项目类别: Major Research Instrumentation
• 财政年份: 2020
• 资助国家: 德国
• 起止时间: 2019-12-31 至 无数据
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/442921285?language=en
• 关键词: Xenonbasiertes; Focused; Ion; Beam; Rasterelektronen

At the Chair of Factory Automation and Production Systems (FAPS) a xenon-based Focused Ion Beam (FIB) - Scanning Electron Microscope (FIB-REM) with integrated RAMAN spectroscopy is to be acquired for about 1.3 million € through funding by the DFG. The Friedrich-Alexander-University Erlangen-Nuremberg enjoys an excellent worldwide reputation in the fields of Material Sciences and Process Research. In particular, the new techniques researched at FAPS for the production of mechatronic functions, such as the laser-structured metallization of spatial circuit carriers (MID), the additive production of power electronic assemblies using selective laser melting (SLM) or cold active plasma metallization (CAPM) and the printing of electronic and optical functions (antennas, PV, OLED, sensors, etc.) on 3D surfaces with ink-, nano- or piezo jetting, are unique worldwide. The generative production of artificial muscles, organ models or a mechatronic iris for aperture control in the human eye on the basis of dielectric elastomer actuators is also unprecedented. The internationally leading research activities in the fields of assembly and connection technology of miniaturized electronic modules by means of diffusion soldering and silver sintering, electrical contacting in electrical machine construction by means of laser or ultrasonic welding as well as the analysis of the reliability of connectors also require a profound understanding of the geometric details and material structure as well as the interrelationships between material, process, environmental conditions and plant specifications. In order to understand the investigated processes more precisely and to open up new potentials, access to advanced techniques and instruments for the analysis of material condition and behaviour on an atomic level is a basic prerequisite. Scanning electron microscopy (SEM) is state of the art. The combination of the SEM with a xenon-based Focused Ion Beam (FIB) and a RAMAN spectroscopy opens up completely new possibilities and is not yet available at the FAU.

在工厂自动化和生产系统（FAPS）主席上，基于氙气的聚焦离子束（FIB） - 扫描电子显微镜（FIB-REM），具有集成的拉曼光谱法可以通过DFG通过资金以130万欧元的价格获得。弗里德里希 - 亚历山大 - 大学埃尔兰根·纳伦堡（Erlangen-Nuremberg）在物质科学和过程研究领域享有良好的声誉。特别是，在FAPS研究中研究的新技术，用于产生机甲功能，例如空间电路载体的激光结构金属化（MID），使用选择性激光熔融（SLM）的电力组件的添加剂产生，或使用冷活动性等离子金属化（CAPM）以及Enteric and Onnent on Antenn oon Antenn，PV，OLE OL OL OL OLE OL OL OLE OL pV，OL墨水，纳米或压电喷射，在全球范围内是独特的。在饮食弹性体执行器的基础上，人工肌肉，器官模型或机电虹膜的通用产生也是前所未有的。通过扩散焊接和银色烧结，通过激光或超声焊接在电气机结构中进行电气接触的小型电子模块领域的国际领先研究活动，以及连接器的可靠性分析，还需要对几何详细信息和物质结构以及物质结构进行深入了解。为了更精确地了解研究过程并打开新的潜力，可以访问高级技术和工具来分析原子水平上的材料状况和行为，这是一个基本的先决条件。扫描电子显微镜（SEM）是艺术的状态。 SEM与基于Xenon的聚焦离子束（FIB）和拉曼光谱的组合开辟了全新的可能性，在FAU上尚不可用。