Study on Single-Point Machining Technology of Supersmooth Surface Using a Flying Tool

飞刀超光滑表面单点加工技术研究

基本信息

批准号：
02452106
负责人：
TANI Yasuhiro
金额：
$ 4.8万
依托单位：
University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (B)
财政年份：
1990
资助国家：
日本
起止时间：
1990 至 1991
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-02452106/
关键词：
Ultraprecision Turning Flying Tool Diamond Magnetic Disc Aluminum Quadrant Photodiode On-Machine Measurement Form Accuracy 単刃切削圧力転写

项目摘要

The present ultraprecision turning is based on the concept of motion copying so that the machining accuracies depend on the motion accuracies of a machine tool. The accuracies of a ultraprecision machine tool is worse than 10nm and it is very difficult to improve that in the near future. Then, a new single-point machining technology using a flying tool has been proposed in order to turn a supersmooth surface even if error motions exist on the machine tool. In the process, a discoid slider with a sapphire chip follows the prefinished surface by the action of hydrodynamic bearing. In this research project, the cutting mechanism of the technology was investigated as follows :(1) The height of the cutting edge was kept between the peak and the vally of the surface roughness so that the surface finish was improved due to the truncation.(2) The cutting depth varied following the vertical acceleration of workpiece surface with small delay, which has some possibility of improving the waviness.At the same time, a new optical inspection system has been developed using two quadrant photocells in order to measure the profile of the workpiece on the machine and the posture of the slider in the process. In the system the displacement was measured applying the principle of triangulation and the inclination angle was detected applying the principle of optical lever. The Surface profile was obtained through the integration of the angle. The results had a high repeatability and a high reliability with comparison of the measured data using other optical interferometric method.

当前的超压缩转弯基于运动复制的概念，因此加工精度取决于机床的运动精度。超重新计算机机床的准确性比10nm差，在不久的将来很难改进它。然后，已经提出了一种使用飞行工具的新的单点加工技术，即使机床上存在错误动作，也可以将超级平滑的表面转动。在此过程中，带有蓝宝石芯片的盘状滑块通过流体动力轴承的作用遵循预制的表面。在该研究项目中，对技术的切割机制进行了如下研究：（1）尖端的高度保持在峰值和表面粗糙度之间的峰值和山顶之间，以便由于截断而改善了表面表面表面表面。（2）在工件表面垂直加速的垂直加速度随着较小的延迟而变化的垂直加速度而变化，这是一定的，这是一定的调查。为了在此过程中测量工件在机器上的工件和滑块的姿势。在系统中，测量了位移，应用三角剖分原理，并使用光杆的原理检测到倾斜角。通过整合角度获得表面轮廓。与使用其他光学干涉方法比较测量数据的结果相比，结果具有很高的可重复性和高可靠性。