Study on Single-Point Machining Technology of Supersmooth Surface Using a Flying Tool

飞刀超光滑表面单点加工技术研究

基本信息

批准号：
02452106
负责人：
TANI Yasuhiro
金额：
$ 4.8万
依托单位：
University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (B)
财政年份：
1990
资助国家：
日本
起止时间：
1990 至 1991
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-02452106/
关键词：
Ultraprecision Turning Flying Tool Diamond Magnetic Disc Aluminum Quadrant Photodiode On-Machine Measurement Form Accuracy 単刃切削圧力転写

项目摘要

The present ultraprecision turning is based on the concept of motion copying so that the machining accuracies depend on the motion accuracies of a machine tool. The accuracies of a ultraprecision machine tool is worse than 10nm and it is very difficult to improve that in the near future. Then, a new single-point machining technology using a flying tool has been proposed in order to turn a supersmooth surface even if error motions exist on the machine tool. In the process, a discoid slider with a sapphire chip follows the prefinished surface by the action of hydrodynamic bearing. In this research project, the cutting mechanism of the technology was investigated as follows :(1) The height of the cutting edge was kept between the peak and the vally of the surface roughness so that the surface finish was improved due to the truncation.(2) The cutting depth varied following the vertical acceleration of workpiece surface with small delay, which has some possibility of improving the waviness.At the same time, a new optical inspection system has been developed using two quadrant photocells in order to measure the profile of the workpiece on the machine and the posture of the slider in the process. In the system the displacement was measured applying the principle of triangulation and the inclination angle was detected applying the principle of optical lever. The Surface profile was obtained through the integration of the angle. The results had a high repeatability and a high reliability with comparison of the measured data using other optical interferometric method.

目前的超精密车削是基于运动复制的概念，因此加工精度取决于机床的运动精度。超精密机床的精度低于10nm，且短期内很难提高。然后，提出了一种使用飞行刀具的新单点加工技术，以便即使机床上存在误差运动也能车削超光滑表面。在此过程中，带有蓝宝石芯片的盘状滑块通过流体动压轴承的作用沿着预加工表面移动。本研究项目对该技术的切削机理进行了如下研究：（1）切削刃的高度保持在表面粗糙度的峰谷之间，通过截断提高了表面光洁度。（ 2）切削深度随着工件表面的垂直加速度而变化，延迟小，有一定改善波纹度的可能性。同时，开发了一种新的光学检测系统，使用两个象限光电管来测量工件的轮廓。机器上的工件和滑块在此过程中的姿态。该系统利用三角测量原理测量位移，利用光学杠杆原理检测倾角。通过角度积分获得表面轮廓。与其他光学干涉测量方法的测量数据相比，结果具有较高的重复性和较高的可靠性。