Development of Highly Homogeneous Pellets Applying Electrophoretic Deposition of Ultrafine Abrasive

应用超细磨料电泳沉积开发高度均匀的颗粒

基本信息

批准号：
07555358
负责人：
TANI Yasuhiro
金额：
$ 0.58万
依托单位：
University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

项目摘要

Grinding is a highly efficient finishhing prosess for hard and brittle materias. Developing a grinding wheel with highly homogeneous bonding strength is important to make a smooth surface by grinding. Here, the highly homogeneous grinding wheel brings about grain-sized self-sharpening in the process, preventing the occurrence of swarf loading and grain dulling which weaken the grinding ability. Our previous research proposed a new process to make the highly homogeneous grinding wheel, namely, an ultrafine abrasive pellet, by the application of electrophoretic deposition of the abrasives charged negatively in the solution.Diamond abrasives, commonly used for fine finishing of the hard and brittle materials, are not negatively charged in the solution. This research proposes a new technique to make highly homogeneous grinding wheel using the electrophoretic deposition of the abrasives, which are not negatively charged in the solution, such as the diamond abrasives.When the diamond abrasives are mixed into the polyelectrolyte solution, the polyelectrolyte, negatively charged, is absorbed on the diamond abrasives. The polyelectrolyte with the diamond abrasive shows the electrophoretic deposition under the electromagnetic field, forming the diamond deposition layr on the anode. In case of using the diamond cluster, 2 to 10 nm in diameter, the thin layr which is applicable to a mounted wheel was obtained on the anode. The finishing experiments using the layr resulted in the feasibility of the finishing of a silicon wafer, but the swarf loading was immediately occurred due to the small sized ship pockets. Thereby, it was considered necessary to thicken the layr for the pellets as well as to enlarge the chip pockets using the large sized diamond abrasives. The effects of the abrasive dimeter and the bonding agent on the characteristics of the diamond deposition layr, that is, pellets were experimentally discussed.

磨削是对硬和脆弱的杂货的高效饰面法律。开发具有高度均匀粘结强度的磨轮对于通过磨削制成光滑的表面很重要。在这里，高度均匀的磨削轮在此过程中带来了晶粒大小的自我塑造，从而防止了SWARF载荷和谷物钝的发生，从而削弱了磨削能力。我们以前的研究提出了一个新的过程，通过在溶液中施加了负剂量的电泳沉积，以使高度磨料的磨料沉积物的涂料施加，以使溶液中收取的磨蚀剂的电泳沉积。材料在溶液中没有负电荷。这项研究提出了一种新技术，以使用磨料的电泳沉积来制作高度均匀的磨轮，这些磨蚀剂不会在溶液中产生负电荷，例如钻石磨蚀剂。当将钻石磨料混合到多电解质溶液中时，多电解质溶液，负电解质，负颗粒液，负电解质，负电解质。充电，被钻石磨蚀剂吸收。带有钻石磨料的聚电解质显示电磁场下的电泳沉积，形成了阳极上的钻石沉积层。如果使用钻石簇（直径为2至10 nm），则在阳极上获得了适用于安装轮的薄列。使用Layr进行的完成实验导致了硅晶片的饰面的可行性，但是由于小尺寸的船袋，立即进行了SWARF载荷。因此，认为有必要使用大尺寸的钻石磨蚀剂来增稠颗粒的衬里以及扩大碎屑口袋。磨料二聚体和键合剂对钻石沉积layr的特性的影响，即，在实验中讨论了颗粒。