%development of ac Calorimetric Method for Thermal Diffusivity Measurement of Thin Films.

用于薄膜热扩散率测量的交流量热法的发展。

• 批准号: 60850004
• 负责人: HATTA Ichiro
• 金额: $ 9.6万
• 依托单位: Nagoya University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research
• 财政年份: 1985
• 资助国家: 日本
• 起止时间: 1985 至 1987
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-60850004/
• 关键词: ac calorimetry; thermal measurement; experimental technique; thin film; thermal diffusivity; thermophysical property; 熱物性; 材料評価; ac calorimetry; thermal measurement; experimental technique; thin film; thermal diffusivity; thermophysical property; 熱物性; 材料評価

a new method to measure thermal diffusivity of a thin sample was developed using a light-irradiated ac calorimetric technique. The experimental conditions and the fundamental equations for the measurement are discussed< In principle, this method can be applied no matter how thin a sample may be. This method is applicable to materials not only with low thermal diffusivity such as polymer films but also with ones with high thermal diffusivity such as a diamond film. In a very thin sample, the contribution of addenda, thermocouple, glue etc., to the precise measurement should be considered. From both theory and experiment, it is verified that the addenda do not affect determination of the thermal diffusivity. We used rectangular plate-like samples which were partly shadowed by a mask. The sample dimension required for the measurement was considered. For the sample length, the distance between the thermocouple and the sample bundary on which ac light is irradiated should be sufficiently long so that thermal waves reflected at the boundary decay. On the other hand, there is no restriction on the other boundary shadowed by the mask, i. e., the thermocouple can be placed just at the boundary.

使用光辐照的交流量热法开发了一种测量薄样品热扩散率的新方法。讨论了测量的实验条件和基本方程<原则上，无论样本有多薄，都可以应用此方法。该方法不仅适用于具有低热扩散率（例如聚合物膜）的材料，而且适用于具有高热扩散率（例如钻石膜）的材料。在非常薄的样本中，应考虑附加，热电偶，胶等对精确测量的贡献。从理论和实验中，可以证明附录不影响热扩散率的确定。我们使用了矩形板状样品，这些样品部分被面具遮蔽。考虑了测量所需的样品维度。对于样品长度，热电偶与辐照交流光线的样品绑带之间的距离应足够长，以便在边界衰减处反射的热波。另一方面，面具所遮蔽的另一个边界没有限制。例如，可以将热电偶放在边界。