%development of ac Calorimetric Method for Thermal Diffusivity Measurement of Thin Films.

用于薄膜热扩散率测量的交流量热法的发展。

• 批准号: 60850004
• 负责人: HATTA Ichiro
• 金额: $ 9.6万
• 依托单位: Nagoya University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research
• 财政年份: 1985
• 资助国家: 日本
• 起止时间: 1985 至 1987
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-60850004/
• 关键词: ac calorimetry; thermal measurement; experimental technique; thin film; thermal diffusivity; thermophysical property; 熱物性; 材料評価

a new method to measure thermal diffusivity of a thin sample was developed using a light-irradiated ac calorimetric technique. The experimental conditions and the fundamental equations for the measurement are discussed< In principle, this method can be applied no matter how thin a sample may be. This method is applicable to materials not only with low thermal diffusivity such as polymer films but also with ones with high thermal diffusivity such as a diamond film. In a very thin sample, the contribution of addenda, thermocouple, glue etc., to the precise measurement should be considered. From both theory and experiment, it is verified that the addenda do not affect determination of the thermal diffusivity. We used rectangular plate-like samples which were partly shadowed by a mask. The sample dimension required for the measurement was considered. For the sample length, the distance between the thermocouple and the sample bundary on which ac light is irradiated should be sufficiently long so that thermal waves reflected at the boundary decay. On the other hand, there is no restriction on the other boundary shadowed by the mask, i. e., the thermocouple can be placed just at the boundary.

使用光照射交流量热技术开发了一种测量薄样品热扩散率的新方法。讨论了测量的实验条件和基本方程<原则上，无论样品多薄，都可以应用该方法。该方法不仅适用于聚合物薄膜等热扩散率低的材料，也适用于金刚石薄膜等热扩散率高的材料。在非常薄的样品中，应考虑附加物、热电偶、胶水等对精确测量的影响。从理论和实验两方面均验证了该附录不影响热扩散率的测定。我们使用矩形板状样本，部分被掩模遮蔽。考虑了测量所需的样品尺寸。对于样品长度，热电偶与交流光照射的样品边界之间的距离应足够长，以使边界处反射的热波衰减。另一方面，对掩模遮蔽的其他边界没有限制，即。即，热电偶可以恰好放置在边界处。

项目成果

I. Hatta, Y. Sasuaga, R. Kato and A. Maesono: "Thermal Diffusivity Measuement of Thin Films by Means of an ac Calorimetric Method" Review of Scientific Instruments. 56. 1643-1647 (1985)

I. Hatta、Y. Sasuaga、R. Kato 和 A. Maesono：“通过交流量热法测量薄膜的热扩散率”科学仪器综述。

H.Yao and I. Hatta: "An ac Microcalorimetric Method for Precise Heat Capacity Measurement in a Small Amount of Liquid" Japanese Journal of Applied Physics. 27. l121-l122 (1988)

H.Yao 和 I. Hatta：“一种用于精确测量少量液体热容的交流微量热法”，日本应用物理学杂志。

I. Hatta: "Thermal Diffusivity Measurement by Means of Light-Irradiation Type ac Calorimetry" Netsu Sokutei. 13. 142-146 (1986)

I. Hatta：“通过光照射型交流量热法进行热扩散率测量”Netsu Sokutei。

I. Hatta, R. Kato and A. Maesono: "Development of ac Calorimetric Method for Thermal Diffusivity Measurement I. Contribution of Thermocouple Attachment in a Thin Sample" Japanese Jouranl of Applied Physics. 25. l493-l495 (1986)

I. Hatta、R. Kato 和 A. Maesono：“用于热扩散率测量的交流量热法的开发 I. 薄样品中热电偶附件的贡献”《日本应用物理学杂志》。

Ichiro Hatta: Japanese Journal of Applied Physics. 25. L493-L495 (1986)

八田一郎：日本应用物理学杂志。