Integrated Microactuator Systems Emphasizing Ni-Mn-Ga Films with a Tailored Microstructure - INTACT - Micromachining and Integration of Ni-Mn-ga Film Actuators for Microsystems Applications

集成微执行器系统强调具有定制微结构的 Ni-Mn-Ga 薄膜 - INTACT - 用于微系统应用的 Ni-Mn-Ga 薄膜执行器的微加工和集成

• 批准号: 28340876
• 负责人: Professor Dr. Manfred Kohl
• 金额: --
• 依托单位: Institut für Mikrostrukturtechnik (IMT)
• 依托单位国家: 德国
• 项目类别: Priority Programmes
• 财政年份: 2006
• 资助国家: 德国
• 起止时间: 2005-12-31 至 2010-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/28340876?language=en
• 关键词: Integrated; Microactuator; Systems; Emphasizing; Ni

This sub-project is part of a joint project, which intents to develop novel integrated microactuator systems based on the large strains of magnetic shape memory (MSM) alloys of up to 10 %. The main objective is to establish and validate a closed process chain to implement sputtered Ni-Mn-Ga films with bulk-like intrinsic properties in a microsystem environment. The sub-project first concentrates on the key technologies to obtain freely movable MSM microstructures. These include the micromachining and functionalizing of sputtered MSM films, which need to be compatible with the technologies to produce highly oriented films with small blocking stress. In order to meet the various constraints, individual processes on optimized buffers/substrates and corresponding transfer technologies will be required. Further technologies to be developed comprise the hybrid integration of FSMA microstructures including the electrical contacting within the plane and perpendicular to the plane of substrate. Systematic experiments will be performed on test structures and microactuators with out-of-plane operation to validate the technologies.

该子项目是一个联合项目的一部分，该项目旨在基于磁性记忆（MSM）合金的大量高达10％的磁形状存储器（MSM）合金开发新型的集成微型抗药瘤系统。主要目的是建立和验证一个封闭的工艺链，以在微系统环境中实现具有散装型固有特性的溅射的Ni-MN-GA膜。亚项目首先集中于关键技术，以获得可自由移动的MSM微结构。其中包括溅射的MSM膜的微加工和功能化，这些薄膜需要与技术兼容，以产生具有较小的阻塞应力的高度取向膜。为了满足各种约束，将需要针对优化的缓冲液/基材和相应转移技术的各个过程。要开发的进一步的技术包括FSMA微结构的杂种整合，包括平面内的电接触以及垂直于底物平面。系统的实验将对具有平面外操作的测试结构和显微散热器进行，以验证技术。