Integrated Microactuator Systems Emphasizing Ni-Mn-Ga Films with a Tailored Microstructure - INTACT - Micromachining and Integration of Ni-Mn-ga Film Actuators for Microsystems Applications

集成微执行器系统强调具有定制微结构的 Ni-Mn-Ga 薄膜 - INTACT - 用于微系统应用的 Ni-Mn-Ga 薄膜执行器的微加工和集成

• 批准号: 28340876
• 负责人: Professor Dr. Manfred Kohl
• 金额: --
• 依托单位: Institut für Mikrostrukturtechnik (IMT)
• 依托单位国家: 德国
• 项目类别: Priority Programmes
• 财政年份: 2006
• 资助国家: 德国
• 起止时间: 2005-12-31 至 2010-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/28340876?language=en
• 关键词: Integrated; Microactuator; Systems; Emphasizing; Ni

This sub-project is part of a joint project, which intents to develop novel integrated microactuator systems based on the large strains of magnetic shape memory (MSM) alloys of up to 10 %. The main objective is to establish and validate a closed process chain to implement sputtered Ni-Mn-Ga films with bulk-like intrinsic properties in a microsystem environment. The sub-project first concentrates on the key technologies to obtain freely movable MSM microstructures. These include the micromachining and functionalizing of sputtered MSM films, which need to be compatible with the technologies to produce highly oriented films with small blocking stress. In order to meet the various constraints, individual processes on optimized buffers/substrates and corresponding transfer technologies will be required. Further technologies to be developed comprise the hybrid integration of FSMA microstructures including the electrical contacting within the plane and perpendicular to the plane of substrate. Systematic experiments will be performed on test structures and microactuators with out-of-plane operation to validate the technologies.

该子项目是一个联合项目的一部分，该项目旨在开发基于高达 10% 的大应变磁性形状记忆 (MSM) 合金的新型集成微执行器系统。主要目标是建立并验证一个封闭的工艺链，以在微系统环境中实现具有块状本征特性的溅射 Ni-Mn-Ga 薄膜。该子项目首先关注获得可自由移动的MSM微结构的关键技术。其中包括溅射 MSM 薄膜的微机械加工和功能化，这需要与生产具有小粘连应力的高度取向薄膜的技术兼容。为了满足各种限制，需要对优化的缓冲液/底物进行单独的处理以及相应的转移技术。进一步开发的技术包括 FSMA 微结构的混合集成，包括平面内和垂直于基板平面的电接触。将在具有平面外操作的测试结构和微执行器上进行系统实验，以验证这些技术。