Microactuator Systems Based on Epitaxial Ni-Mn-Ga Films with Magnetic Shape Memory Effect (EPITACT)

基于具有磁形状记忆效应的外延 Ni-Mn-Ga 薄膜 (EPITACT) 的微执行器系统

• 批准号: 28340332
• 负责人: Privatdozent Dr. Sebastian Fähler
• 金额: --
• 依托单位: Institut für Ionenstrahlphysik und Materialforschung
• 依托单位国家: 德国
• 项目类别: Priority Programmes
• 财政年份: 2006
• 资助国家: 德国
• 起止时间: 2005-12-31 至 2013-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/28340332?language=en
• 关键词: Microactuator; Systems; Based; Epitaxial; Ni

Bulk magnetic shape memory (MSM) alloys like Ni-Mn-Ga single crystals reach high strains up to 10 % in a moderate magnetic field. In a joint project novel integrated micro actuator systems based on MSM films are developed. This sub-project aims at the growth of epitaxial Ni-Mn-Ga films with a tailored microstructure suitable for micro actuators. Films will be released from the substrate to obtain a significant MSM effect. The influence of the deposition conditions (composition, thermal treatment, substrate, buffer, deposition rate etc.) on phase formation, microstructure (texture, grain size, defects) and the resulting magnetic / magnetoelastic properties are examined. These films are used to study the difference of the MSM effect in thin films compared to bulk.

在中等磁场中，散装磁性记忆（MSM）合金（如Ni-MN-GA单晶）达到高达10％的高应变。在联合项目中，开发了基于MSM膜的小说集成微执行器系统。该亚项目旨在使用适合微执行器的量身定制的微结构的外延Ni-Mn-GA膜的生长。膜将从基板上发行，以获得明显的MSM效应。检查沉积条件（组成，热处理，基材，缓冲液，沉积速率等）对相形成，微结构（纹理，晶粒尺寸，缺陷）以及所得的磁 /磁弹性特性的影响。与散装相比，这些薄膜用于研究薄膜中MSM效应的差异。