MRI: Acquisition of Plasma Multi-ion-source Focused Ion Beam Microscope

MRI：采集等离子体多离子源聚焦离子束显微镜

• 批准号: 2018964
• 负责人: Elizabeth Dickey
• 金额: $ 129.7万
• 依托单位: North Carolina State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2020
• 资助国家: 美国
• 起止时间: 2020-07-15 至 2021-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2018964&HistoricalAwards=false
• 关键词: MRI; Acquisition; Plasma; Multi; ion

This award from the Major Research Instrumentation program supports the acquisition of a state-of-the-art focused ion beam /scanning electron microscope outfitted with advanced detectors and automation tools. The instrument enables and supports a diverse range of research projects and programs, within academia and industry, that involve three-dimensional, multi-modal characterization and patterning of microstructures. Such three-dimensional analysis is particularly important for developing materials processing strategies for additive manufacturing and for understanding mechanisms leading to material degradation and failure. In addition, the nanopatterning capabilities of the instrument provide precision engineering of novel nanometer-scale optical and mechanical devices. The location of the instrument within the Research Triangle Nanotechnology Network, a node of the NSF National Nanotechnology Coordinated Infrastructure (NNCI), provides enhanced access to researchers from across the nation, impacting local universities, not-for-profit institutions and industries. The instrument will be integrated into the curriculum developed under an NSF-funded National Research Traineeship program, which brings together the materials science, statistics and machine learning communities to develop new approaches to materials informatics research. Workshops and training modules will be developed to broaden participation from minority institutions and to educate a new generation of researchers at the intersection of statistics and materials science. This award supports the acquisition of an inductively coupled plasma (ICP) multi-ion source focused-ion beam/ scanning electron microscope (pFIB/SEM) to support the ongoing and future research of numerous faculty, postdoctoral and student researchers from across five academic departments at North Carolina State University and regional universities. In addition, the instrument will be broadly utilized by other academic and industry research communities via the Research Triangle Nanotechnology Network, a node of the NSF National Nanotechnology Coordinated Infrastructure (NNCI). The instrument is outfitted specifically for statistically meaningful quantitative characterization of material microstructures in three dimensions across length scales from nano meter to millimeter. The coupling of automation tools with the rapid sputtering rates unlocks the ability to: 1) study material properties governed by complex hierarchical material microstructures, 2) study three dimensional microstructures in materials that would be susceptible to artifacts from ion implantation using conventional Ga ion sources, and 3) pattern large area yet high fidelity (nanometer-scale resolution) patterns in a variety of materials. The broader impacts of the infrastructure lie in leveraging the unique capabilities of the North Carolina State Analytical Instrumentation Facility in training a diverse user-base and in developing education modules at the graduate, undergraduate and K-12 levels.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

主要研究仪器计划的奖项支持采用具有高级探测器和自动化工具的最先进的离子光束 /扫描电子显微镜。 该仪器在学术界和行业内提供并支持各种各样的研究项目和计划，其中涉及三维，多模式的表征和微观结构的模式。这种三维分析对于制定材料处理策略以及理解导致材料降解和失败的机制尤为重要。 此外，仪器的纳米图案功能还提供了新型纳米尺度光学和机械设备的精确工程。该仪器在研究三角纳米技术网络中的位置是NSF国家纳米技术协调基础设施（NNCI）的节点，可增强全国研究人员的访问，影响当地大学，非营利性机构和行业。该工具将集成到根据NSF资助的国家研究训练计划开发的课程中，该课程汇集了材料科学，统计和机器学习社区，以开发新的材料信息学研究方法。将开发研讨会和培训模块，以扩大少数族裔机构的参与，并在统计与材料科学的交集中教育新一代的研究人员。 该奖项支持收购电感耦合等离子体（ICP）多离子源专注于离子束/扫描电子显微镜（PFIB/ SEM），以支持来自北卡罗来纳州州立大学和地区大学五个学术部门的众多教职员工，博士后和学生研究人员的持续和未来研究。此外，该工具将通过研究三角纳米技术网络（NSF国家纳米技术协调基础设施（NNCI）的节点）广泛使用。该仪器专门针对从纳米仪到毫米的长度尺度上三个维度的材料微观结构对统计有意义的定量表征。自动化工具与快速溅射速率的耦合解锁：1）研究由复杂的分层材料微观结构支配的材料特性，2）在材料中研究三维微观结构，这些微观结构易于使用离子植入的伪像，使用传统区域的构图（3）模式的材料（nanannan scale sakale sakale sakale san inanan scale sapale a vorter a ressale a ressake a protife of to totifation of Ion植入。 The broader impacts of the infrastructure lie in leveraging the unique capabilities of the North Carolina State Analytical Instrumentation Facility in training a diverse user-base and in developing education modules at the graduate, undergraduate and K-12 levels.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.