MRI: Acquisition of a hybrid sputtering/evaporation thin film deposition system

MRI：购买混合溅射/蒸发薄膜沉积系统

• 批准号: 1726380
• 负责人: Sara Callori
• 金额: $ 25.49万
• 依托单位: University Enterprises Corporation at CSUSB
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2017
• 资助国家: 美国
• 起止时间: 2017-09-01 至 2019-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1726380&HistoricalAwards=false
• 关键词: MRI; Acquisition; hybrid; sputtering; evaporation

Part 1: This award from the Major Research Instrumentation (MRI) program supports research and training at California State University San Bernardino (CSUSB) through the acquisition of a thin film sputter deposition system. The proposed deposition system allows the principal investigator to grow high-quality ferroic oxide thin films and multilayers. By controlling the film thickness and composition, specific material properties or combinations of properties can be fine-tuned. This system will be utilized alongside the existing capabilities of the NSF-CREST funded CSUSB Center for Advanced Functional Materials, which will allow for the creation and characterization of novel hybrid organic/oxide systems as well as broaden student research participation and training at a large Hispanic- and minority-serving institution. The development of thin films for research aims and applications has led to important discoveries that have advanced the understanding of the interesting science at play in these films as well as allowed an accelerated development of technological materials. Ferroic materials, including ferroelectric and magnetic and multiferroics, have "led the charge" in many areas of research and development and will continue to do so in the future. As the need to understand and engineer ferroic thin film systems that can operate faster, more efficiently, or display novel functional properties grows, acquiring high-quality thin films will play a vital role in research programs centered around functional material studies. Part 2: This award supports the acquisition of a thin film sputter deposition system for scientific research and research training at California State University San Bernardino (CSUSB). This system will be used to deposit thin films and multilayered samples as a part of several research both within CSUSB and with domestic and international collaborators. It will combine off-axis rf-magneton sputtering and existing thermal evaporation capabilities in order to engineer a wide variety of single crystal and polycrystalline samples. The use of two techniques will allow research on novel systems combining often dissimilar materials, such as oxide and organic ferroelectrics, as well as allow for in-situ deposition of bottom electrodes, which can help avoid problems of interfacial contamination or electrically dead layers. This instrument supports research efforts by current faculty members, visiting graduate students, and undergraduate researchers and will enhance CSUSB's NSF-CREST funded Center for Advanced Functional Materials (CAFM). Current research focus includes: 1) Engineering novel ferroelectric and magnetic properties into single crystal oxide thin films using a variety of control parameters accessible though film growth including epitaxial strain and multilayer growth 2) Developing organic ferroelectric thin films 3) The study of functional hybrid organic/oxide systems. This award will increase the research infrastructure at CSUSB, particularly by furthering access to equipment for the deposition of a wide variety of thin films. CSUSB is an undergraduate-focused university and a qualifying Hispanic- and Minority-Serving institution, allowing the acquisition of this instrument to broaden participation of students from these demographics in state-of-the-art research. Community college partnerships will broaden the local reach of the instrumentation and further develop the STEM pipeline in the local area. Through the CREST program, the feasibility of a Materials Science Masters program is being investigated and a hybrid deposition system would serve as a major facility for research projects and training associated with such a program. Additionally, the ability to provide high-quality thin film samples will support the development of strong domestic and international collaborations focusing on the characterization of new thin film based systems.

第1部分：主要研究工具（MRI）计划的奖项通过收购薄膜溅射沉积系统，支持加利福尼亚州立大学圣贝纳迪诺（CSUSB）的研究和培训。提出的沉积系统允许主要研究者生长高品质的铁氧化物薄膜和多层。通过控制膜的厚度和组成，可以微调特定的材料特性或特性的组合。该系统将与NSF-Crest资助的CSUSB高级功能材料中心的现有能力一起使用，该中心将允许创建和表征新型混合有机/氧化物系统，并在大型西班牙裔和少数派服务机构中扩大学生的研究参与和培训。用于研究目的和应用的薄膜的发展导致了重要的发现，这些发现使人们对这些电影中有趣的科学有了了解，并允许加速技术材料的发展。铁电材料，包括铁电和磁性和多种表情，在许多研发领域都“领导”，并将在将来继续这样做。 随着需要了解和设计可以更快，更有效或展示新型功能性能运行的铁蛋白薄膜系统的需求，获得高质量的薄膜将在围绕功能材料研究的研究计划中起着至关重要的作用。第2部分：该奖项支持在加利福尼亚州立大学圣贝纳迪诺（CSUSB）的科学研究和研究培训中获得薄膜溅射系统。该系统将用于将薄膜和多层样本存放为CSUSB以及国内和国际合作者的几项研究的一部分。它将结合轴上RF-MAGNETON溅射和现有的热蒸发能力，以设计各种单晶和多晶样品。使用两种技术将允许对新型系统进行研究，从而将通常不同的材料（例如氧化物和有机铁电材料）组合在一起，并允许底部电极的原位沉积，这可以帮助避免界面污染或电死亡层的问题。该工具支持现任教职员工，访问研究生和本科研究人员的研究工作，并将增强CSUSB的NSF-Crest资助的高级功能材料中心（CAFM）。当前的研究重点包括：1）工程新型的铁电和磁性特性，使用各种控制参数可访问膜的生长，包括外延菌株和多层生长2）开发有机铁电薄膜3）研究功能性混合有机/氧化物系统。该奖项将增加CSUSB的研究基础设施，特别是通过进一步访问设备以沉积各种薄膜。 CSUSB是一所注重本科的大学，是一所合格的西班牙裔和少数族裔服务机构，允许收购该工具，以扩大这些人口统计学的学生参与最先进的研究。社区学院的合作伙伴关系将扩大仪器的当地覆盖范围，并进一步开发当地的STEM管道。通过CREST计划，正在研究材料科学硕士计划的可行性，混合沉积系统将成为与此类计划相关的研究项目和培训的主要设施。此外，提供高质量的薄膜样品的能力将支持开发强大的国内和国际合作，重点是新的基于薄膜的系统的表征。