MRI: Acquisition of a hybrid sputtering/evaporation thin film deposition system

MRI：购买混合溅射/蒸发薄膜沉积系统

• 批准号: 1726380
• 负责人: Sara Callori
• 金额: $ 25.49万
• 依托单位: University Enterprises Corporation at CSUSB
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2017
• 资助国家: 美国
• 起止时间: 2017-09-01 至 2019-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1726380&HistoricalAwards=false
• 关键词: MRI; Acquisition; hybrid; sputtering; evaporation

Part 1: This award from the Major Research Instrumentation (MRI) program supports research and training at California State University San Bernardino (CSUSB) through the acquisition of a thin film sputter deposition system. The proposed deposition system allows the principal investigator to grow high-quality ferroic oxide thin films and multilayers. By controlling the film thickness and composition, specific material properties or combinations of properties can be fine-tuned. This system will be utilized alongside the existing capabilities of the NSF-CREST funded CSUSB Center for Advanced Functional Materials, which will allow for the creation and characterization of novel hybrid organic/oxide systems as well as broaden student research participation and training at a large Hispanic- and minority-serving institution. The development of thin films for research aims and applications has led to important discoveries that have advanced the understanding of the interesting science at play in these films as well as allowed an accelerated development of technological materials. Ferroic materials, including ferroelectric and magnetic and multiferroics, have "led the charge" in many areas of research and development and will continue to do so in the future. As the need to understand and engineer ferroic thin film systems that can operate faster, more efficiently, or display novel functional properties grows, acquiring high-quality thin films will play a vital role in research programs centered around functional material studies. Part 2: This award supports the acquisition of a thin film sputter deposition system for scientific research and research training at California State University San Bernardino (CSUSB). This system will be used to deposit thin films and multilayered samples as a part of several research both within CSUSB and with domestic and international collaborators. It will combine off-axis rf-magneton sputtering and existing thermal evaporation capabilities in order to engineer a wide variety of single crystal and polycrystalline samples. The use of two techniques will allow research on novel systems combining often dissimilar materials, such as oxide and organic ferroelectrics, as well as allow for in-situ deposition of bottom electrodes, which can help avoid problems of interfacial contamination or electrically dead layers. This instrument supports research efforts by current faculty members, visiting graduate students, and undergraduate researchers and will enhance CSUSB's NSF-CREST funded Center for Advanced Functional Materials (CAFM). Current research focus includes: 1) Engineering novel ferroelectric and magnetic properties into single crystal oxide thin films using a variety of control parameters accessible though film growth including epitaxial strain and multilayer growth 2) Developing organic ferroelectric thin films 3) The study of functional hybrid organic/oxide systems. This award will increase the research infrastructure at CSUSB, particularly by furthering access to equipment for the deposition of a wide variety of thin films. CSUSB is an undergraduate-focused university and a qualifying Hispanic- and Minority-Serving institution, allowing the acquisition of this instrument to broaden participation of students from these demographics in state-of-the-art research. Community college partnerships will broaden the local reach of the instrumentation and further develop the STEM pipeline in the local area. Through the CREST program, the feasibility of a Materials Science Masters program is being investigated and a hybrid deposition system would serve as a major facility for research projects and training associated with such a program. Additionally, the ability to provide high-quality thin film samples will support the development of strong domestic and international collaborations focusing on the characterization of new thin film based systems.

第 1 部分：该奖项来自主要研究仪器 (MRI) 计划，通过购买薄膜溅射沉积系统来支持加州州立大学圣贝纳迪诺分校 (CSUSB) 的研究和培训。所提出的沉积系统允许主要研究人员生长高质量的氧化铁薄膜和多层膜。通过控制薄膜厚度和成分，可以微调特定的材料性能或性能组合。该系统将与 NSF-CREST 资助的 CSUSB 先进功能材料中心的现有功能一起使用，这将允许创建和表征新型混合有机/氧化物系统，并扩大学生的研究参与和在大型西班牙裔美国人中的培训- 和少数族裔服务机构。用于研究目的和应用的薄膜的开发带来了重要的发现，促进了对这些薄膜中有趣的科学的理解，并加速了技术材料的发展。铁材料，包括铁电材料、磁性材料和多铁材料，在许多研究和开发领域“引领潮流”，并将在未来继续如此。 随着理解和设计能够更快、更高效地运行或显示新颖功能特性的铁性薄膜系统的需求不断增长，获取高质量薄膜将在以功能材料研究为中心的研究项目中发挥至关重要的作用。第 2 部分：该奖项支持加州州立大学圣贝纳迪诺分校 (CSUSB) 购买用于科学研究和研究培训的薄膜溅射沉积系统。该系统将用于沉积薄膜和多层样品，作为 CSUSB 内部以及与国内外合作者进行的多项研究的一部分。它将结合离轴射频磁子溅射和现有的热蒸发功能，以设计各种单晶和多晶样品。两种技术的使用将允许研究通常结合不同材料（例如氧化物和有机铁电体）的新颖系统，并允许底部电极的原位沉积，这有助于避免界面污染或电死层的问题。该仪器支持现有教员、访问研究生和本科生研究人员的研究工作，并将增强 CSUSB 的 NSF-CREST 资助的先进功能材料中心 (CAFM)。目前的研究重点包括： 1) 使用通过薄膜生长可实现的各种控制参数（包括外延应变和多层生长）将新颖的铁电和磁性特性设计到单晶氧化物薄膜中 2) 开发有机铁电薄膜 3) 功能杂化有机薄膜的研究/氧化物系统。该奖项将增强 CSUSB 的研究基础设施，特别是通过进一步获得用于沉积各种薄膜的设备。 CSUSB 是一所以本科生为重点的大学，也是一所合格的拉美裔和少数族裔服务机构，允许购买该工具以扩大这些人群的学生对最先进研究的参与。社区大学的合作伙伴关系将扩大仪器在当地的影响范围，并进一步发展当地的 STEM 管道。通过 CREST 计划，正在研究材料科学硕士计划的可行性，混合沉积系统将作为与该计划相关的研究项目和培训的主要设施。此外，提供高质量薄膜样品的能力将支持国内和国际合作的发展，重点关注新型薄膜系统的表征。