Collaborative Research: Improving Capabilities of Micro-scale Vibratory Systems by Embracing and Accounting for Large-Amplitude Responses

合作研究：通过拥抱和考虑大振幅响应来提高微尺度振动系统的能力

• 批准号: 1561934
• 负责人: Kimberly Foster
• 金额: $ 30万
• 依托单位: University of California-Santa Barbara
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2016
• 资助国家: 美国
• 起止时间: 2016-04-01 至 2019-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1561934&HistoricalAwards=false
• 关键词: Collaborative; Research; Improving; Capabilities; Micro

This project considers the development of techniques to assist in the design and optimization of micro-electro-mechanical-systems (MEMS) that utilize resonant vibrations. These micro-scale devices are important elements in many consumer electronics and products including wireless telephones, automobiles, and entertainment devices. The capabilities of these systems are often limited by a number of factors that restrict their range of operation, such as their maximum amplitude of vibration. This research pursues a fundamental understanding of these limitations and developing systematic tools for improving the performance of these devices. The broader impact of this project includes outreach, mentoring and training, inclusion of students from underrepresented groups, development of classroom materials motivated by the research, and dissemination of results. This project will result in multidisciplinary training of students, who benefit from the close collaboration and integrated theoretical and experimental research approach of the PIs. Also, the PIs and their graduate students will continue their longstanding participation in summer outreach programs to middle- and high-school students, and the inclusion of undergraduate research assistants. The PIs also plan to create an alumni mentoring program for graduate students, in which current graduate students will be connected with alumni who will offer professional advice and support.Most commercial devices that employ vibratory MEMS are designed so that the resonant elements operate in their linear range and the designer can rely on simple models to analyze their response. However, this sets limits on their operating range that do not take full advantage of their potential. There have been recent efforts demonstrating significantly improved performance when nonlinear effects are systematically included in the MEMS design process. The focus of this project is to embrace nonlinear behavior in resonators, to develop an understanding of the attendant limits, and to develop and experimentally demonstrate design methods that allow one to optimize performance in this realm. The research focus is on MEMS that operate with one or two fundamental vibratory modes that can be described by weakly nonlinear models so that analytical methods, namely perturbation techniques, and the theory of normal forms, are applicable. These models are linked with multi-physics computational tools and optimization techniques, using normal forms to formulate objective functions for the applications of interest. Devices developed with these tools will be fabricated, characterized, and tested to validate the approach. Applications will include frequency generation, frequency conversion, and inertial sensing.

该项目考虑开发利用共振振动的微型机械系统（MEMS）的设计和优化。 这些微尺度设备是许多消费电子和产品（包括无线电话，汽车和娱乐设备）的重要元素。这些系统的功能通常受到限制其操作范围的许多因素的限制，例如它们的最大振动幅度。 这项研究追求对这些局限性的基本了解，并开发系统的工具来改善这些设备的性能。 该项目的更广泛影响包括外展，指导和培训，包括代表性不足的群体的学生，开发研究促进的课堂材料以及结果的传播。 该项目将导致对学生的多学科培训，这些培训受益于密切合作，并综合了PI的理论和实验研究方法。 此外，PIS及其研究生将继续他们长期参与中学和高中生的夏季外展计划，并包括本科研究助理。 PIS还计划为研究生创建校友指导计划，在该计划中，当前研究生将与校友建立联系，校友将提供专业的建议和支持。使用振动性MEMS的大多数商业设备都设计了，以便共鸣元素在线性范围内运行，设计人员可以依靠简单的模型来分析其响应。 但是，这设定了其运营范围内的限制，这些限制无法充分利用其潜力。 最近的努力表明，当MEMS设计过程中有系统地包括非线性效应时，性能显着提高。 该项目的重点是拥抱谐振器中的非线性行为，对随之而来的限制有一种理解，并开发和实验展示设计方法，使人们可以优化该领域的性能。 研究重点是使用一种或两种基本振动模式运行的MEMS，这些模式可以通过弱非线性模型来描述，因此分析方法，即扰动技术和正常形式的理论是适用的。 这些模型与多物理计算工具和优化技术相关，并使用正常形式来为感兴趣的应用制定目标函数。 使用这些工具开发的设备将进行制造，表征和测试以验证方法。 应用将包括频率产生，频率转换和惯性感应。