Collaborative Research: MEMS from Organized Mesoscale Architectures of Carbon Nanotubes

合作研究：来自碳纳米管有序介观结构的 MEMS

• 批准号: 0424416
• 负责人: Kimberly Foster
• 金额: $ 17万
• 依托单位: University of California-Santa Barbara
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-09-01 至 2007-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0424416&HistoricalAwards=false
• 关键词: Collaborative; Research; MEMS; Organized; Mesoscale

The objective of this research is to harness mesoscale assemblies of organized mesoscale architectures of highly oriented multi-walled CNT's actuation and sensing using the microelectromechanical systems MEMS platform. In particular, we will create a new class of devices and microsystems using preferentially grown CNTs on Si-based MEMS structures. The CNT-MEMS hybrid structures will be fabricated by a combination of Si/SiO2 processing and a unique multidirectional CNT growth process. We will then measure the mechanical actuation and response dynamics of a wide variety of structures including cantilevers, torsion beams, membranes of various shapes in inert and electrochemically active environments for applications such as electrical-pulse based triggering and sensing. transduction schemes in mechanical systems. The intellectual merits of this work enable the translation of the attractive properties of individual CNTs into a completely new "break-through" technology of nanotube-mesostructrure-based microdevices on silicon via standard micro and nanofabrication. The proposed research has the potential to demonstrate a completely new "break-through" technology that will pave the path for integration of CNTs into MEMS platforms, yielding a variety of new nanotechnology-based microdevices actuators and sensors. The broader impacts involve interaction at many educational levels. Through connections previously established with the support of MESA(CA Science outreach program), the PI and the graduate students and/or REU's supported by this grant plan to visit science classes in the Junior high, and conduct science experiments related to nanoscale research. This newly emerging and exciting area will serve as a medium in our outreach activities to attract bright high-school students to science and engineering.

这项研究的目的是利用微型机械系统MEMS平台利用高度定向的多壁CNT驱动和感测的有组织的中尺度体系结构的中尺度组件。特别是，我们将使用基于SI的MEMS结构上的CNT来创建新的设备和微型系统。 CNT-MEMS混合结构将通过SI/SIO2处理和独特的多向CNT生长过程的组合来制造。 然后，我们将测量各种结构的机械致动和响应动力学，包括悬臂，扭转束，惰性中各种形状的膜以及用于应用的应用，例如基于电脉冲的触发和传感。机械系统中的转导方案。 这项工作的智力优点使单个CNT的有吸引力的特性通过标准微型和纳米制定的硅硅固有微发音评估转换为纳米管 - 弥补的微发音评估的全新“突破性”技术。 拟议的研究有可能证明一种全新的“突破性”技术，该技术将为将CNT集成到MEMS平台中铺平道路，从而产生各种新的基于纳米技术的新型微型电视执行器和传感器。更广泛的影响涉及许多教育水平的互动。通过以前在MESA（CA科学外展计划）的支持下建立的联系，PI和研究生和/或REU得到了本赠款计划的支持，以参观初中的科学课程，并进行与纳米级研究有关的科学实验。 这个新兴和令人兴奋的领域将在我们的外展活动中成为一种媒介，以吸引聪明的高中生进入科学和工程学。