A New Robust and Energy-efficient Microactuator Device for Demanding Applications

适用于高要求应用的新型稳健且节能的微执行器设备

• 批准号: 1307237
• 负责人: Feng Zhao
• 金额: $ 24.01万
• 依托单位: Washington State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2013
• 资助国家: 美国
• 起止时间: 2013-06-01 至 2017-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1307237&HistoricalAwards=false
• 关键词: New; Robust; Energy; efficient; Microactuator

The objective of this program is to explore and lay a solid foundation for a new generation of microactuator devices. The robust microactuator device developed in the program will satisfy the imperative demands of energy efficiency and operation in harsh environments, including high temperature and pressure, radiation, corrosion, chemical and biological domains, etc. The intellectual merit is to develop a novel microactuator device technology which combines the advantages of photonic actuation and wide bandgap silicon carbide material. The all silicon carbide platform truly exploits the superior material properties of silicon carbide for demanding applications. The photonic actuation enables intrinsic safety, reliability, and electromagnetic interference immunity. The key technological challenge currently limiting silicon carbide microelectromechanical systems fabrication will be solved by an innovative surface micromachining process. High speed and high energy efficiency will be accomplished by a series of unique approaches. The proposed work is expected to achieve a new device technology offering harsh environment operability and long-term reliability, open a new strategic area of research on silicon carbide, and advance the state-of-the-art of a wide range of sensing and actuating systems.The broader impacts are to expose graduate and undergraduate students involved in the project to an interdisciplinary approach for problem solving, including solid state electronics, mechanical engineering, photonic and quantum mechanical simulations, and device fabrication and characterization. It will broaden dissemination to enhance scientific and technological understanding through journal and conference publications, K-12 outreach, and industrial interaction and partnership.

该项目的目标是探索新一代微执行器器件并为其奠定坚实的基础。该项目开发的强大的微执行器器件将满足能源效率和恶劣环境下运行的迫切需求，包括高温高压、辐射、腐蚀、化学和生物领域等。其智力优势是开发一种新型的微执行器器件技术它结合了光子驱动和宽带隙碳化硅材料的优点。全碳化硅平台真正利用碳化硅的卓越材料特性来满足要求苛刻的应用。光子驱动可实现本质安全、可靠性和抗电磁干扰性。目前限制碳化硅微机电系统制造的关键技术挑战将通过创新的表面微加工工艺来解决。高速度和高能效将通过一系列独特的方法来实现。拟议的工作预计将实现一种新的设备技术，提供恶劣环境下的可操作性和长期可靠性，开辟碳化硅的新战略研究领域，并推进各种传感和驱动的最先进技术更广泛的影响是让参与该项目的研究生和本科生接触到解决问题的跨学科方法，包括固态电子学、机械工程、光子和量子力学模拟以及器件制造和表征。 它将通过期刊和会议出版物、K-12 外展以及行业互动和伙伴关系扩大传播范围，以增强科学和技术的理解。