EAGER: Micromachined Sensors for Multi-functional and Autonomous Analysis of Geofluids: A New Approach to the Design and Performance of Chemical Sensors in Extreme Environments

EAGER：用于地质流体多功能和自主分析的微机械传感器：极端环境中化学传感器设计和性能的新方法

• 批准号: 1043063
• 负责人: Yogesh Gianchandani
• 金额: $ 5.18万
• 依托单位: Regents of the University of Michigan - Ann Arbor
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-08-01 至 2012-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1043063&HistoricalAwards=false
• 关键词: EAGER; Micromachined; Sensors; Multi; functional

This EAGER project uses newly developed micro-ultrasonic and micro-electro-discharge machining methods to develop rapid prototyping of a new generation of nano-enabled sensors. If successful, the work will both dramatically expand available options for lithography-compatible, batch-mode microfabrication of ceramic and metal microstructures and provide new technology allowing the development of new, more sensitive, and more robust environmental sensors for aquatic environments. Recently developed lithography-compatible micromachining techniques will be explored, with the goal of decreasing the thickness and increasing the sensitivity and spatial resolution of protonic ceramic membranes, such as yttrium-stabilized zirconia (YST), a ceramic used in pH and redox sensor electrodes that are used to make measurements in high temperature (400 degree C) corrosive environments (seawater). Broader impacts of the work include the collaboration of researchers from three fields that do not commonly interact (nan-manufacturing, geoscience, and biology), development of new infrastructure for science engineering, and the potential for dramatically improving aquatic sensor sensitivity and longevity even in harsh environmental conditions like those found in seafloor hydrothermal vents. Student training in novel, state-of-the-art manufacturing techniques and nanotechnology is also involved.

这个急切的项目使用新开发的微尿和微电荷加工方法来开发新一代纳米启用的传感器的快速原型制作。 如果成功的话，这项工作将大大扩展可用的陶瓷和金属微观结构的批处理，批处理模式微结构的可用选项，并提供新的技术，从而为水生环境开发新的，更敏感，更强大的环境传感器。 将探索最近开发的刻板兼容的微加工技术，目的是降低厚度并提高质子陶瓷膜的灵敏度和空间分辨率，例如在pH和Redox传感器电极中使用的coramic corlose corlose corme corlose corros corre corre corres corre corre corre corremection（400 corr）（400 corr）（400 corr）（400 corr）（400 cor）（400 cor）corres corre corre corremic corramic（YST）。这项工作的更广泛影响包括来自通常不相互作用的三个领域的研究人员（NAN制造，地球科学和生物学），开发新的科学工程基础架构，以及在像在海底水平效果下发现的那些在恶劣的环境条件下显着改善水生感传感器敏感性和寿命的潜力。 还涉及到小说，最先进的制造技术和纳米技术的学生培训。