Compact non-invasive ultrasonic flow and wind speed sensors based on micromachined ultrasonic transducers compatible with above-IC integration

基于与 IC 集成兼容的微机械超声换能器的紧凑型非侵入式超声流量和风速传感器

• 批准号: 543712-2019
• 负责人: Nabki, Frederic
• 金额: $ 10.85万
• 依托单位: École de technologie supérieure
• 依托单位国家: 加拿大
• 项目类别: Collaborative Research and Development Grants
• 财政年份: 2020
• 资助国家: 加拿大
• 起止时间: 2020-01-01 至 2021-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=699680
• 关键词: Compact; non; invasive; ultrasonic; flow

Historically, flow sensors have been a workhorse in a wide range of industrial and medical applications. However, they are typically relatively large which limits deployment or, if micromachined, they often rely on thermal effects forcing invasive operation, which limits the number of compatible applications. Ultrasonic flow sensors can remedy the latter limitation, and capacitive micromachined ultrasonic transducers (CMUTs) can render them more compact, mitigating the former limitation. Industrial partner MEMS-Vision wishes to start a research effort to expand its custom MEMS above-IC compatible fabrication process to create such sensors. MEMS-Vision aims to create the most compact sensing system, including both the transducer and integrated circuits. It has sought the expertise of Prof. Nabki, whose experience spans the design and fabrication of microelectromechanical systems (MEMS) as well as integrated circuits, to orchestrate this research effort in collaboration. Accordingly, this project aims to create compact non-invasive ultrasonic flow and wind speed sensors based on CMUTs, touching not only on the design and fabrication of the transducers, but on the design of the driving, biasing, signal conditioning, and processing integrated circuits that are required to create an integrated sensing system. Challenges pertaining to the enhanced process, integrated circuits, packaging, and integration into compact sensing systems will be addressed over the course of this project to expand the potential of MEMS-Vision's technology. The project's outcomes will go beyond enhancing MEMS-Vision's process and creating novel compact flow and wind speed sensors, as the CMUTs devised could find applications in other areas such as fingerprinting or medical imaging. The HQP will gain advanced and marketable design and manufacturing skills in a multidisciplinary setting touching both MEMS and electronics. The project will train 2 post-doctoral fellows, 2 PhDs, 2 Master's and 2 undergraduate students. It will yield advances in the fields of MEMS, sensing, interfacing ICs, and integration, which represents significant contributions to research in Canada.

从历史上看，流动传感器一直是各种工业和医疗应用中的主力军。但是，它们通常是相对较大的，它限制了部署的限制，或者如果微机械，它们通常依赖于迫使侵入性操作的热效应，从而限制了兼容应用的数量。超声流动传感器可以纠正后一个限制，电容性微机械超声传感器（CMUT）可以使它们更紧凑，从而减轻了以前的限制。工业合作伙伴Mems-Vision希望开始研究工作，以将其自定义MEMS扩展到IC兼容的制造过程中，以创建此类传感器。 MEMS视觉旨在创建最紧凑的传感系统，包括传感器和集成电路。它寻求Nabki教授的专业知识，该教授的经验涵盖了微机械系统（MEMS）的设计和制造以及集成的电路，以协作这项研究工作。因此，该项目旨在基于CMUT创建紧凑的非侵入性超声流和风速传感器，不仅触摸了传感器的设计和制造，而且触摸了驾驶，偏见，信号调理和处理集成的电路的设计，这些电路是创建集成传感系统所需的。在本项目的过程中，将解决与增强过程，集成电路，包装和集成到紧凑型传感系统中有关的挑战，以扩大MEMS-Vision技术的潜力。 该项目的结果将超越增强MEMS视觉的过程，并创建新型的紧凑流量和风速传感器，因为所设计的CMUT可以在其他领域（例如指纹或医学成像）找到应用。 HQP将在接触MEMS和电子产品的多学科环境中获得高级且可销售的设计和制造技巧。该项目将培训2名博士后研究员，2位博士学位，2名硕士和2名本科生。它将在MEMS，传感，接口IC和集成领域的领域取得进步，这代表了加拿大研究的重要贡献。