CAREER: High Force, High Speed Electro-Thermal Micro-Actuators: Design, Fabrications, and Applications

职业：高力、高速电热微执行器：设计、制造和应用

• 批准号: 0233187
• 负责人: Yogesh Gianchandani
• 金额: $ 18.55万
• 依托单位: Regents of the University of Michigan - Ann Arbor
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-01-01 至 2006-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0233187&HistoricalAwards=false
• 关键词: CAREER; Force; Speed; Electro; Thermal

The absence of suitable actuators limits the development of silicon-based microsystems. For in-plane actuation, the best contenders are electrostatic and thermal actuators, but the former require high drive voltages, and both deliver forces in the range of only about 1-10 uN. This proposal addresses a new class of electrothermal microactuators that promises 100X increase force and 10X reduction in drive voltage. They leverage deformations caused by localized thermal stresses to efficiently produce large forces without compromising displacement.The devices will be designed by two complementary approaches, and further refined by numerical analysis in conjunction with optimal design of experiments. Designs that offer rectilinear, circular and customized loci of motion will be developed and evaluated for performance criteria such as output force and displacement, input power, drive voltage, response speed, device lifetime, trajectory errors, mechanical vibration, etc. Time-sequenced engines such as inchworms, which offer high displacement and force with negligible standby power, will also be developed. Designs will be fabricated in multiple technologies to permit comparative evaluations of performance and degradation mechanisms. Maskless process variations are proposed for standard technologies for selective confinement of heat and current flux, which minimize power consumption and response time.Preliminary results indicate that static displacements 100 microns and peak forces 1 mN are feasible with standard technologies. Several applications are proposed, with complementary demands on various performance aspects: a positioner for scanning probe microscopy; a positioner for optical elements in a micro-optomechanical system; and a sliding shunt for high-frequency telecommunication systems. In the long term these actuators will also be used to develop haptic interfaces, e.g. for simulating microsurgery.One educational objective is to increase the participation of under-represented groups in the MEMS research community using early recruitment programs and interaction with student groups. Another is to facilitate interdisciplinary education using practical engineering projects that force the convergence of multiple specialties to fill the pedagogical gaps between relevant departments. These efforts will be reinforced by interactions with industry.

没有合适的执行器限制了基于硅的微系统的发展。 对于平面驱动，最好的竞争者是静电和热执行器，但前者需要高驱动电压，并且两者仅在约1-10个联合国范围内提供力。 该提案介绍了一类新的电热显微散热器，该驱动器有望增加100倍的力和驱动电压下降10倍。 它们利用由局部热应力引起的变形，以有效地产生大型力而不会损害位移。这些设备将通过两种互补方法设计，并通过数值分析与实验的最佳设计一起进一步完善。 将开发和评估提供直线，循环和定制运动基因座的设计，并评估诸如输出力和位移，输入功率，驱动电压，响应速度，设备寿命，轨迹误差，机械振动等等性能标准，诸如INCHERMENS等时间段的发动机，这些发动机（例如Inchnorks），这些引擎也提供了高位置和力量，这些发动机也提供了高位置和力量。 设计将在多种技术中制造，以允许对性能和降解机制进行比较评估。提出了用于选择性限制热量和电流通量的标准技术的无掩模过程变化，从而最大程度地减少功耗和响应时间。先验结果表明，静态位移100微米和峰值力1 MN可与标准技术可行。 提出了几种应用，对各个绩效方面有互补的要求：扫描探针显微镜的定位器；微型力学系统中光学元素的定位器；以及用于高频电信系统的滑动分流。 从长远来看，这些执行器也将用于开发触觉界面，例如一个教育目标是通过早期招​​聘计划和与学生群体的互动来增加代表性不足的群体在MEMS研究社区中的参与。 另一个是使用实用的工程项目来促进跨学科教育，这些项目迫使多个专业的融合以填补相关部门之间的教学差距。 与行业的互动将加强这些努力。