MRI-R2 Consortium: Acquisition of an Electron Beam Lithography System to Support Transformative Device and Materials Research in the Greater Houston Area

MRI-R2 联盟：收购电子束光刻系统以支持大休斯顿地区的变革性器件和材料研究

• 批准号: 0959343
• 负责人: Dmitri Litvinov
• 金额: $ 80万
• 依托单位: University of Houston
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-03-15 至 2013-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0959343&HistoricalAwards=false
• 关键词: MRI; R2; Consortium; Acquisition; Electron

This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).Objective: The objective of this grant application is to acquire an electron beam lithography (EBL) system to support nanofabrication research in the Houston metropolitan area. Houston is home to numerous research-intensive universities, the Texas Medical Center, and active industrial research. The system will be installed at the University of Houston, which houses the only shared fabrication resources in the Greater Houston area. This acquisition will build on the existing tool set and provide state-of-the-art nanofabrication capabilities to a broad user base, thereby elevating nanoscience research in Houston to a globally competitive level.Intellectual Merit: Acquisition of a dedicated EBL system will enhance transformative research across a wide range of federally-funded materials and device programs, including nanomagnetic devices, biosensors, drug/gene delivery, resistive RAM, vertical electronic devices, chemically-amplified imaging materials, nanopantography, magnetic nanoconstrictions, nanowire interconnects, nanoscale light sources, nanomechanics, microfluidics, and nanostructured spintronic devices. The enabling EBL capabilities will stimulate development of new research programs.Broader Impacts: The EBL acquisition will enhance the educational experience of more than 60 students at the University of Houston (UH), University of Texas Health Science Center (UTHSC), and Rice University. Team members will incorporate EBL training into educational programs at their home institutions, including Integrative Graduate Education and Research Traineeship at Rice; Research Experiences for Undergraduates at UH and Rice; Research Experiences for Teachers at UH; Alliances for Graduate Education and the Professoriate at UH and Rice; Awards to Stimulate and Support Undergraduate Research Education at Rice; and Nanotechnology Undergraduate Education at UH.

该奖项是根据2009年的《美国回收与再现法》（公法111-5）进行资助的。对象：本赠款申请的目的是获取电子束光刻（EBL）系统，以支持休斯顿大都会地区的纳米制造研究。休斯顿是众多研究密集型大学，得克萨斯州医学中心和活跃的工业研究的所在地。该系统将安装在休斯敦大学，该大学拥有大休斯顿地区唯一共享的制造资源。 This acquisition will build on the existing tool set and provide state-of-the-art nanofabrication capabilities to a broad user base, thereby elevating nanoscience research in Houston to a globally competitive level.Intellectual Merit: Acquisition of a dedicated EBL system will enhance transformative research across a wide range of federally-funded materials and device programs, including nanomagnetic devices, biosensors, drug/gene delivery, resistive RAM,垂直电子设备，化学放大的成像材料，纳米抗摄影，磁性纳米收缩，纳米线互连，纳米级光源，纳米力学，微流体和纳米结构的Spintronic设备。促成EBL功能将刺激新研究计划的发展。Broader的影响：EBL的收购将增强休斯敦大学（UH），德克萨斯大学健康科学中心（UTHSC）和莱斯大学的60多名学生的教育经验。 团队成员将在其家庭机构中将EBL培训纳入教育计划中，包括综合研究生教育和赖斯的研究实习；在UH和大米的大学生研究经验； UH教师的研究经验；联盟研究生教育和UH和赖斯的教授；奖励促进和支持赖斯的本科研究教育；和UH的纳米技术本科教育。