CAREER: Deposition and Interface Properties of Metal Oxide Films on GaAs

职业：GaAs 上金属氧化物薄膜的沉积和界面特性

• 批准号: 0846445
• 负责人: Theodosia Gougousi
• 金额: $ 53.07万
• 依托单位: University of Maryland Baltimore County
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-05-01 至 2015-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0846445&HistoricalAwards=false
• 关键词: CAREER; Deposition; Interface; Properties; Metal

Technical: This project aims to produce fundamental knowledge about the molecular level mechanisms of atomic layer deposition (ALD). In particular, atomic layer deposition of metal oxide films from alkyl amide precursors and water on GaAs surfaces is studied. GaAs due to its intriguing surface chemistry provides a suitable system to test and further our understanding of the molecular level mechanisms and kinetic processes involved in the atomic layer deposition process. Furthermore, its increasing technological importance make such as study very timely as it aims to bridge a gap of fundamental knowledge in the literature. A comprehensive approach that includes both in-situ monitoring of the surface chemistry using infrared spectroscopy as well as extensive ex-situ analysis of the materials and interface properties is used during the research project.Non-technical: The project addresses basic research issues in a topical area of materials science with high technological relevance. Graduate students from diverse backgrounds are trained in an interdisciplinary field, and a much needed interdisciplinary laboratory course in materials characterization is introduced to complement an existing lecture course in the physics of surfaces and interfaces. Undergraduate students from disadvantaged backgrounds, as well as participants of the McNair program at the University of Maryland Baltimore County, are mentored during a summer research program with the goal to encourage their interest in scientific careers.

技术：该项目旨在产生有关原子层沉积（ALD）分子水平机制的基本知识。特别是，研究了GAAS表面上的烷基酰胺前体和水的金属氧化物膜的原子层沉积。 GAA由于其吸引人的表面化学而提供了一个合适的系统来测试和进一步了解原子层沉积过程中涉及的分子水平机制和动力学过程。此外，其技术的越来越重要使得像研究一样及时，因为它旨在弥合文献中基本知识的差距。在研究项目期间使用了一种全面的方法，该方法包括使用红外光谱对材料和材料特性的广泛的现场分析进行对表面化学的监测。具有高技术相关性的材料科学领域。来自不同背景的研究生在跨学科领域进行了培训，并引入了急需的跨学科实验室课程，以补充表面和界面物理学中现有的讲座课程。来自弱势背景的本科生以及马里兰州巴尔的摩大学麦克奈尔计划的参与者在夏季研究计划中受到指导，目的是鼓励他们对科学职业的兴趣。